From Event: SPIE Commercial + Scientific Sensing and Imaging, 2018
This paper proposes a motion compensation method to reduce the motion-induced error in phase shifting pro-filometry. We first estimate the motion of an object from the difference between two subsequent 3D frames. After that, by taking the advantage of projector's pinhole model, we can determine the motion-induced phase shifting error from the estimated motion. A generic three-step phase-shifting algorithm considering phase shift error is then utilized to compute the phase. We have conducted quantitative experiments to demonstrate that the proposed algorithm can effectively improve the measurement accuracy without additional information or further constraints.
Ziping Liu and Song Zhang, "Motion-induced error compensation for 3D shape measurement with phase shifting technique," Proc. SPIE 10667, Dimensional Optical Metrology and Inspection for Practical Applications VII, 1066707 (Presented at SPIE Commercial + Scientific Sensing and Imaging: April 18, 2018; Published: 14 May 2018); https://doi.org/10.1117/12.2309576.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon