From Event: SPIE Commercial + Scientific Sensing and Imaging, 2018
Fourier Ptychography is a novel imaging technique consists in combining many coherent images acquired with various illumination angle and combined using an efficient phase retrieval algorithm. This technique allows to synthesize a larger numerical aperture than physically possible by the lens aperture alone, often limited by manufacturing capabilities. We present here an adaptation of the Fourier Ptychography technique to a synchrotron-based full-field microscope (SHARP) operating at 13.5nm (EUV wavelength) and demonstrate 26nm coherent resolution on reflective samples, alongside with quantitative phase imaging which allows to characterize sub-nanometer substrate roughness.
Antoine Wojdyla, Markus P. Benk, Kenneth A. Goldberg, and Patrick P. Naulleau, "Fourier ptychography at short wavelength with a synchrotron-based microscope (Conference Presentation)," Proc. SPIE 10669, Computational Imaging III, 106690M (Presented at SPIE Commercial + Scientific Sensing and Imaging: April 16, 2018; Published: 15 May 2018); https://doi.org/10.1117/12.2303447.5783309684001.
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