In this paper, we present the construction and preliminary experimental results of a MOEMS fiber-based integrated probe for endoscopic optical imaging of stomach tissue using a Swept-Source Optical Coherence Tomography (SSOCT). The probe consists of a Mirau micro-interferometer, combined with a GRIN lens collimator and a micromirror scanner. We describe the building blocks of the probe, especially the monolithically integrated Mirau mirointerferometer, fabricated by wafer-level vertical stacking and anodic bonding of Si/glass components, and the electrothermal 2-axis MEMS microscanner allowing large swept angles (up to ±22°) at high frequencies (> kHz) for low driving voltages (<20 V). The results of probe characterization, performed in a designed SS-OCT system, have confirmed proper operation of the probe. The B-scan images were obtained for central wavelength of λc = 840 nm, swept range of Dλ = 60 nm and A-scan frequency of fA= 110 kHz. The axial resolution of the probe is equal to 5.2 μm (determined by applied swept source), whereas the lateral resolution, measured by use of USAF test pattern, is 9.8 μm.
Przemyslaw Struk, Sylwester Bargiel, Quentin A. A. Tanguy, Christophe Gorecki, Huikai Xie, Ravinder Chutani, Nicolas Passilly, and Alain Billard , "The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection," Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 1067807 (Presented at SPIE Photonics Europe: April 25, 2018; Published: 24 May 2018); https://doi.org/10.1117/12.2311298.
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