Structured Silicon layers are used to improve light harvesting by Si-based solar cells. Microstructure of Si is obtained by a selective Si etching using aggressive solvents (acids like HF). In the approach discussed in this work a simplified architecture of solar cells is discussed. A structured electrode is formed by deposition of ZnO nanorods on top of p-type Si. This modification eliminates energy consuming and environmental unfriendly technological steps, as discussed. The so-obtained 3D top electrode consists of n-type ZnO:Al (AZO) layer grown on ZnMgO coated zinc oxide nanorods. AZO and ZnMgO films are deposited by Atomic Layer Deposition method (ALD). Advantages of this technique are first discussed. Several possible applications of the ALD are reviewed.
Rafał Pietruszka, Bartłomiej S. Witkowski, Monika Ożga, Małgorzata Łukasiewicz, and Marek Godlewski, "Modified PV structures with a nanostructured top electrode ," Proc. SPIE 10688, Photonics for Solar Energy Systems VII, 106880K (Presented at SPIE Photonics Europe: April 24, 2018; Published: 22 May 2018); https://doi.org/10.1117/12.2307382.
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