In this paper we present the size reduction of a 160-channel, 50-GHz Si3N4 based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm applying our proprietary “AWG-Parameters” tool. For the simulations of AWG layout, the PHASAR photonics tool from Optiwave was used. The simulated results show satisfying optical properties of the designed AWG-spectrometer. However, such high-channel count AWG features large size. To solve this problem we designed a special taper enabling the reduction of AWG structure by about 15%, while keeping the same optical properties. The technological verification of both AWG designs is also presented.
D. Seyringer, C. Burtscher, J. Edlinger, W. Drexler, E. Rank, P. Muellner, R. Hainberger, A. Maese-Novo, M. Vlaskovic, H. Zimmermann, J. Kraft, G. Koppitsch, M. Sagmeister, and G. Meinhardt, "Size reduction of high-channel Si3N4 based AWG-spectrometer for medical applications," Proc. SPIE 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV, 107300R (Presented at SPIE Nanoscience + Engineering: August 22, 2018; Published: 19 September 2018); https://doi.org/10.1117/12.2319670.
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