From Event: SPIE Optical Engineering + Applications, 2018
We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their performance, comparing grating-based lateral shearing interferometry and Hartmann wavefront sensing. We created a compact shearing interferometer concept with a dense array of binary amplitude gratings in a single membrane to support one-dimensional wavefront measurements across a wide wavelength range without the need for longitudinal position adjustment. We find that a common scaling parameter based on wavelength and the distance to the measurement plane guides the design of both systems toward optimal sensitivity. We show preliminary results from recent experiments demonstrating one and two-dimensional wavefront sensing below the Marechal criterion.
Antoine Wojdyla, Diane Bryant, Weilun Chao, Lahsen Assoufid, Daniele Cocco, Mourad Idir, and Kenneth A. Goldberg, "Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors
," Proc. SPIE 10760, Advances in X-Ray/EUV Optics and Components XIII, 1076003 (Presented at SPIE Optical Engineering + Applications: August 20, 2018; Published: 17 September 2018); https://doi.org/10.1117/12.2321642.
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