Silicon is a widely used material in modern microelectronics and photonics. Extremely low optical losses in near and mid-IR wavelengths made it a promising material for whispering gallery mode (WGM) optical micro-resonators. But, till now its potential was not fully utilized because of the best-obtained quality factor - about 2 x 107 - remained orders of magnitude below the material absorption limit. In this work we experimentally demonstrated a quality factor above 109 for the WGM in millimetres size crystalline silicon resonators. Materials with different residual conductivity were compared. Application of original semi-spherical silicon coupler allowed to obtain up to 35% resonance peaks contrast.
Igor A. Bilenko, Artem E. Shitikov, Valery E. Lobanov, Nikita M. Kondratiev, Andrey S. Voloshin, and Michael L. Gorodetsky, "Experimental observation of above billion quality factor in silicon crystalline optical whispering gallery mode resonators," Proc. SPIE 10904, Laser Resonators, Microresonators, and Beam Control XXI, 1090402 (Presented at SPIE LASE: February 04, 2019; Published: 4 March 2019); https://doi.org/10.1117/12.2508783.
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