This paper presents the design and testing of a new CO2 gas sensor that is based on a piezoelectric Langasite (La3Ga5SiO14) crystal resonator with temperature compensation. CO2 gas concentration change can be measured by monitoring frequency shift due to the adsorption of CO2 gas molecules. The sensor is designed and fabricated as a body acoustic wave (BAW) resonator, and coated with Zinc Oxide thin film for sensitivity improvement. Then it is experimentally tested in the laboratory with a self-designed, temperature controlled gas chamber at a wide CO2 concentration range. Moreover, temperature compensation is formulated and tested by applying the dual mode behavior of the Langasite BAW resonator. The sensor shows a good relationship between CO2 gas concentration and its resonant frequency shift. The proposed sensor can be applied at high temperatures particularly in combustion engines, power plant and other high temperature applications.
Chen Zhang, Abhishek Ghosh, and Haifeng Zhang, "Langasite-based BAW resonator coated with ZnO for high temperature CO2 gas sensing with temperature compensation (Conference Presentation)," Proc. SPIE 10970, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2019, 109702B (Presented at SPIE Smart Structures + Nondestructive Evaluation: March 08, 2019; Published: 29 March 2019); https://doi.org/10.1117/12.2517034.6020105501001.
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