This LETI/Sofradir/Defir study aims at realizing sub-10 μm pitch HgCdTe infrared FPAs. To cope with the different diode process issues related to pitch reduction-morphologic realization, short-circuits, FTM optimization - a parametric study was carried out - contact size, passivation properties, doping levels, diode processing conditions-. A wafer-level test campaign was conducted to evaluate the process window. It revealed functional MWIR diodes from 15 μm to 3 μm pitch. 7.5 μm pitch 640×512 and 5 μm pitch 64×152 FPA were characterized and turned out to be functional.
J. Abergel, F. Rochette, S. Gout, X. Baudry, C. Grangier, A. Even, J.-L. Santailler, D. Giotta, R. Obrecht, T. Pellerin, L. Bonnefond, J. Rothman, and S. Bisotto, "Development of sub-10µm pitch HgCdTe infrared detectors," Proc. SPIE 11002, Infrared Technology and Applications XLV, 1100222 (Presented at SPIE Defense + Commercial Sensing: April 18, 2019; Published: 7 May 2019); https://doi.org/10.1117/12.2520030.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the proceedings. They include the speaker's narration with video of the slides and animations. Most include full-text papers. Interactive, searchable transcripts and closed captioning are now available for most presentations.
Search our growing collection of more than 18,000 conference presentations, including many plenaries and keynotes.