Characterizing the surface of microlenses by optical profilers has the important advantages of measurement speed, flexibility and automation. Nevertheless, the accuracy of such characterization is limited by error occurring in non-flat measurements. Here, we propose a method that uses multiple measurements of a single reference ball combined with a machine learning algorithm that fits the experimental data to correct the measurements. The success of the method is demonstrated by showing that the residual error after correction reaches 20 nm RMS. Such results extend greatly the quality of microlens characterization by optical profilers.

© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Jeremy Béguelin, Torald Scharf, Wilfried Noell, and Reinhard Voelkel, "Correction of surface error occurring in microlenses characterization performed by optical profilers," Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560Z (Presented at SPIE Optical Metrology: June 26, 2019; Published: 21 June 2019); https://doi.org/10.1117/12.2525693.