Pyramidal quantum dots have been established as a promising source of single and entangled photons for quantum information applications. However, their small brightness calls for new strategies both to boost extraction efficiency and to plan for heterogeneous integration protocols in view of demanding quantum information processing applications. In this paper we show that a simple technique based on chemo-mechanical planarization (CMP) can effectively remove several obstacles to the further processing of this kind of system, and pave the way for the use of in-situ lithographic techniques to tag individual quantum dots.

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S. Varo, G. Juska, I. Ranjbar, S. T. Moroni, A. Gocalinska, and E. Pelucchi, "Engineering site-controlled quantum dots for optical quantum information processing," Proc. SPIE 11085, Low-Dimensional Materials and Devices 2019, 1108507 (Presented at SPIE Nanoscience + Engineering: August 11, 2019; Published: 9 September 2019); https://doi.org/10.1117/12.2528830.