From Event: SPIE Optical Engineering + Applications, 2019
For on-line surface measurement of transparent optical elements, phase measuring deflectometry (PMD) is a very promising method. However, the parasitic reflection from the rear surface is an existing problem for PMD to measure transparent element. A parasitic reflection eliminating method using binary pattern is proposed, the principle of which is described in detail. And the proposed method is implemented on a transparent window glass with a thickness of about 10mm. The surface shape result shows a good agreement with the interferometer data with a sub-wavelength level accuracy.
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Ruiyang Wang and Dahai Li, "Transparent element surface measurement using binary pattern in phase-measuring deflectometry," Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090P (Presented at SPIE Optical Engineering + Applications: August 12, 2019; Published: 9 September 2019); https://doi.org/10.1117/12.2527718.