From Event: SPIE LASE, 2022
In this paper, we report on the findings that pertain to evaluating the immediate viability of an UV-fiber-laserbased Si crystallization method referred to as spot-beam annealing (SBA). The SBA method leverages ultra-high frequency/low-energy pulses in order to flexibly create optimal conditions for executing various crystallization and annealing techniques for display and semiconductor applications. Specifically, we present recent experimental results that were obtained using a newly constructed SBA system that definitively show that SBA is capable of providing a highly ordered polycrystalline material, which is equivalent to the material generated using stateof-the-art ELA manufacturing systems. We discuss the implication of the results on the effectiveness of the polygon-scanner-based beam delivery schemes, and additional future variations and applications of the SBA method.
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Ruobing Song, Jayoung Park, Nikita Lisenko, Bonan Shen, Alexander Killips, Adithya P. Nair, Joshua Schoenly, Manuel Leonardo, Roger Dowd, and James S. Im, "Fiber-laser crystallization of Si films for advanced displays via the spot-beam annealing method," Proc. SPIE 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, 1198808 (Presented at SPIE LASE: January 25, 2022; Published: 4 March 2022); https://doi.org/10.1117/12.2611946.