We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm). Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm. The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited. Lower losses can be achieved by further optimization of the cross-section of the waveguides. In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.

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W. A. P. M. Hendriks, M. Dijkstra, S. Mardani, I. Hegeman, and Sonia M. Garcia-Blanco, "Low-loss photonic integrated circuits for UV applications," Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242402 (Presented at SPIE OPTO: January 30, 2023; Published: 17 March 2023); https://doi.org/10.1117/12.2657143.