We present the results and progress of research to create a multiplex chemical sensor based on Au catalyzed vapor-liquid-solid (VLS) silicon nanowires deployed as resonant mass sensors. Each element of this sensor has a single VLS wire grown in close proximity to a Si photodiode. Together they create a Fabry-Pérot interferometer that allows for the sensitive detection of the beam’s resonant motion. Small changes in mass on the cantilever that occur as a result of chemical absorption on the functionalized Au surface shift the resonant frequency. Our integrated approach will allow large reductions in system complexity for this sensor class.
Brian A Bryce, Jason J Gorman, Sergiy Keylyuk, and Albert Davydov, "Integrated vapor-liquid-solid silicon mass sensors (Presentation Recording)," Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955304 (Presented at SPIE Nanoscience + Engineering: August 12, 2015; Published: 5 October 2015); https://doi.org/10.1117/12.2192083.4519371097001.
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