Metamaterials designed for the visible or near IR wavelengths require patterning on the nanometer scale. To achieve this, e-beam lithography is used, but it is extremely difficult and can only produce 2D structures. A new alternative technique to produce 2D and 3D structures involves laser fabrication using the Nanoscribe 3D laser lithography system. This is a direct laser writing technique which can form arbitrary 3D nanostructures on the nanometer scale and is based on multi-photon polymerization. We are creating 2D and 3D metamaterials via this technique, and subsequently conformally coating them using Atomic Layer Deposition of oxides and Ag. We will discuss the optical properties of these novel composite structures and their potential for dual resonant metamaterials.
Sharka M. Prokes, Frank K. Perkins, and Orest J. Glembocki, "Formation and properties of 3D metamaterial composites fabricated using nanometer scale laser lithography (Presentation Recording)," Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955311 (Presented at SPIE Nanoscience + Engineering: August 13, 2015; Published: 5 October 2015); https://doi.org/10.1117/12.2190016.4519371101001.
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