As a high-precision servo motion platform, the dual-stage lithographic system uses lots of long-stroke air-bearing linear
motors to achieve rapid positioning. Residual vibration, resulting from direct drive, almost zero damping, parallel
decoupling structure and high velocity, leads to too long settling time and is one of the key factors in slowing the speed of
positioning. To suppress the residual vibration and realize the high positioning precision in shorter settling time, this paper
designs feedforward controller with input shaping algorithm for the rotary motor. Traditional input shaper is sensitive to
system models and it is very difficult to get the parameters. A parameter self-learning method based on PSO(Particle
Swarm Optimization) is proposed in this paper. The simulation of the system is performed by MATLAB/Simulation. The
experimental results indicate that the input shaping algorithm proposed in this paper brings about significant reduction in
the positioning time of the dual-stage.
Fazhi Song, Yan Wang, Xinglin Chen, and Ping He, "Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage," Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560P (Presented at SPIE Nanoscience + Engineering: August 12, 2015; Published: 20 August 2015); https://doi.org/10.1117/12.2186912.
Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the proceedings. They include the speaker's narration with video of the slides and animations. Most include full-text papers. Interactive, searchable transcripts and closed captioning are now available for 2018 presentations, with transcripts for prior recordings added daily.
Search our growing collection of more than 16,000 conference presentations, including many plenaries and keynotes.