The inorganic polarization devices for visible range, namely the absorptive gird polarizers and form birefringent wave plates, were developed. These devices are composed only of inorganic materials and glancing angle deposition technique was employed to fabricate their optical functional layers, which are the absorptive layer and columnar birefringent structure for the polarizers and wave plates, respectively. The optical performance and reliability of these devices were experimentally evaluated and showed them to be suitable for applications requiring high light resistance and thermal durability, such as liquid crystal display projectors.
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