We present a Nomarski microscope with variable shear distance that allows for determining the full complex
modulation function including the quantitative phase contrast that a specimen imposes on incident light, rather
than only its differential phase contrast. The system preserves all beneficial properties of the Nomarski setup
with respect to coherence and stability. Hence, we can measure the quantitative phase contrast under Köhler
illumination with full condenser aperture and without vibration isolation. We will explain the system, give an
analysis of the coherence requirements and provide an example from the field of MEMS inspection.
Claas Falldorf, Mostafa Agour, Jonas Kötter, and Ralf B. Bergmann, "Quantitative phase contrast imaging using a Nomarski microscope with variable shear distance," Proc. SPIE 9718, Quantitative Phase Imaging II, 97182I (Presented at SPIE BiOS: February 17, 2016; Published: 9 March 2016); https://doi.org/10.1117/12.2212757.
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