In this work, we present for the first time a partially slotted silicon ring resonator (PSRR) covered with an electro-optical polymer (Poly[(methyl methacrylate)-co-(Disperse Red 1 acrylate)]). The PSRR takes advantage of both a highly efficient vertical slot waveguide based phase shifter and a low loss strip waveguide in a single ring. The device is realized on 200 mm silicon-on-insulator wafers using 248 nm DUV lithography and covered with the electro-optic polymer in a post process. This silicon-organic hybrid ring resonator has a small footprint, high optical quality factor, and high DC device tunability. A quality factor of up to 105 and a DC device tunability of about 700 pm/V is experimentally demonstrated in the wavelength range of 1540 nm to 1590 nm. Further, we compare our results with state-of-the-art silicon-organic hybrid devices by determining the poling efficiency. It is demonstrated that the active PSRR is a promising candidate for efficient optical switches and tunable filters.
Patrick Steglich, Christian Mai, David Stolarek, Stefan Lischke, Sebastian Kupijai, Claus Villringer, Silvio Pulwer, Friedhelm Heinrich, Joachim Bauer, Stefan Meister, Dieter Knoll, Mauro Casalboni, and Sigurd Schrader, "Partially slotted silicon ring resonator covered with electro-optical polymer," Proc. SPIE 9891, Silicon Photonics and Photonic Integrated Circuits V, 98910R (Presented at SPIE Photonics Europe: April 05, 2016; Published: 13 May 2016); https://doi.org/10.1117/12.2217725.
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