Technological developments in laser technology require advancements in optical components. Such demand is particularly important in UV spectral region. Antireflection coatings (AR) and waveplates as a widely used optical elements were produced based on glancing angle deposition (GLAD) method. Superior optical performance was measured for AR thin films. Broadband and broad-angle antireflection coatings were manufactured by using multilayer system when changing the refractive index profile by varying the porosity of material. SiO2, Al2O3 and LaF3 materials were used for formation of waveplates for UV region. An investigation of optical and resistant performance were conducted. All materials showed optical losses at the wavelength of 355 nm. Possible technological solutions are presented and investigated.
Tomas Tolenis, Lina Grinevičiūtė, Rytis Buzelis, Laurynas Petronis, and Ramutis Drazdys, "Glancing angle deposition for production of optical components in UV region," Proc. SPIE 9929, Nanostructured Thin Films IX, 99290D (Presented at SPIE Nanoscience + Engineering: August 31, 2016; Published: 26 September 2016); https://doi.org/10.1117/12.2237120.
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