From Event: SPIE Optical Engineering + Applications, 2016
A method to reduce the phase measurement errors generated from internal-reflection light noise in a Fizeau
interferometer is proposed. In addition to an ordinary phase-shift by a mechanical translation of the reference surface, the
test surface is also mechanically translated between each phase measurement to further modulate the signal phase. For
spherical tests, a mechanical phase-shift generally generates a spatial non-uniformity in the phase increment across the
observing aperture. It is shown that a minimum of three positional measurements is necessary to cancel out the
systematic error caused by this non-uniformity. Linear combinations of the three measured phases can also cancel the
additional primary spherical aberrations that occur when the test surface is out of the null position of the confocal
Toshiki Kumagai, Kenichi Hibino, and Yasunari Nagaike, "Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer," Proc. SPIE 9960, Interferometry XVIII, 99600C (Presented at SPIE Optical Engineering + Applications: August 31, 2016; Published: 28 August 2016); https://doi.org/10.1117/12.2237494.
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