From Event: SPIE Optical Engineering + Applications, 2016
The ultrahigh static displacement-acceleration sensitivity of a mechanical sensing chip is essential primarily for an ultrasensitive
accelerometer. In this paper, an optimal design to implement to a single-axis MOEMS accelerometer consisting
of a grating interferometry cavity and a micromachined sensing chip is presented. The micromachined sensing chip is
composed of a proof mass along with its mechanical cantilever suspension and substrate. The dimensional parameters of
the sensing chip, including the length, width, thickness and position of the cantilevers are evaluated and optimized both
analytically and by finite-element-method (FEM) simulation to yield an unprecedented acceleration-displacement
sensitivity. Compared with one of the most sensitive single-axis MOEMS accelerometers reported in the literature, the
optimal mechanical design can yield a profound sensitivity improvement with an equal footprint area, specifically, 200%
improvement in displacement-acceleration sensitivity with moderate resonant frequency and dynamic range. The
modified design was microfabricated, packaged with the grating interferometry cavity and tested. The experimental
results demonstrate that the MOEMS accelerometer with modified design can achieve the acceleration-displacement
sensitivity of about 150μm/g and acceleration sensitivity of greater than 1500V/g, which validates the effectiveness of
the optimal design.
Qianbo Lu, Jian Bai, Kaiwei Wang, Shuqi Lou, Xufen Jiao, Dandan Han, and Guoguang Yang, "Mechanical design optimization of a single-axis MOEMS accelerometer based on a grating interferometry cavity for ultrahigh sensitivity," Proc. SPIE 9960, Interferometry XVIII, 99600W (Presented at SPIE Optical Engineering + Applications: September 01, 2016; Published: 28 August 2016); https://doi.org/10.1117/12.2235409.
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