From Event: SPIE Optical Engineering + Applications, 2016
There is a temperature drift of an accelerometer attributed to the temperature variation, which would adversely influence
the output performance. In this paper, a quantitative analysis of the temperature effect and the temperature compensation
of a MOEMS accelerometer, which is composed of a grating interferometric cavity and a micromachined sensing chip,
are proposed. A finite-element-method (FEM) approach is applied in this work to simulate the deformation of the
sensing chip of the MOEMS accelerometer at different temperature from -20°C to 70°C. The deformation results in the
variation of the distance between the grating and the sensing chip of the MOEMS accelerometer, modulating the output
intensities finally. A static temperature model is set up to describe the temperature characteristics of the accelerometer
through the simulation results and the temperature compensation is put forward based on the temperature model, which
can improve the output performance of the accelerometer. This model is permitted to estimate the temperature effect of
this type accelerometer, which contains a micromachined sensing chip. Comparison of the output intensities with and
without temperature compensation indicates that the temperature compensation can improve the stability of the output
intensities of the MOEMS accelerometer based on a grating interferometric cavity.
Dandan Han, Jian Bai, Qianbo Lu, Shuqi Lou, Xufen Jiao, and Guoguang Yang, "The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavity," Proc. SPIE 9960, Interferometry XVIII, 99600X (Presented at SPIE Optical Engineering + Applications: September 01, 2016; Published: 28 August 2016); https://doi.org/10.1117/12.2236584.
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