From Event: SPIE Optical Engineering + Applications, 2016
The long trace profiler (LTP) at SPring-8 has been upgraded using a newly developed laser-based slope sensor for
precise measurements with high spatial resolution. Simulations of centroid calculation in the slope sensor have been
performed to evaluate the ultimate accuracy of slope measurement. A performance test of the LTP has also been
performed, and a spatial resolution of 0.6 mm has been confirmed.
Y. Senba, H. Kishimoto, T. Miura, and H. Ohashi, "Development of a long trace profiler at SPring-8 using a newly developed slope sensor," Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996204 (Presented at SPIE Optical Engineering + Applications: August 29, 2016; Published: 8 September 2016); https://doi.org/10.1117/12.2239394.
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