From Event: SPIE Optical Engineering + Applications, 2016
Recently, we introduced a nano Computed Tomography (nano-CT) system based on a customized JEOL scanning
electron microscope applying the principle of shadow microscopy and yielding a spatial resolution of approximately
3000lp/mm. The system has been upgraded and now comprises a photon counting PIXIRAD-2 detector as well as a
customized nano-positioning stage for object and electron target. The latter is a tungsten needle with a tip radius of
100nm produced by electrochemical etching. Here we present for the first time nano-CT volume images of
microstructures within an AlCu29 sample recorded by the upgraded system (XRM-II). The quality of the iteratively
reconstructed and regularized volumes is assessed by means of detail visibility and line spread. We found the spatial
resolution to be at least 300nm. The image processing chain, in particular geometric misalignment correction is of
critical importance for a successful nano-CT measurement with the XRM-II.
P. Stahlhut, K. Dremel, J. Dittmann, J. M. Engel, S. Zabler, A. Hoelzing, and R. Hanke, "First results on laboratory nano-CT with a needle reflection target and an adapted toolchain," Proc. SPIE 9967, Developments in X-Ray Tomography X, 99670I (Presented at SPIE Optical Engineering + Applications: August 29, 2016; Published: 3 October 2016); https://doi.org/10.1117/12.2240561.
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