Development of a standalone zoneplate based EUV mask defect review tool

Chami Perera

doi:10.1117/12.2656116

Conference Presentations

Conference Presentations are recordings of oral presentations given at SPIE conferences and published as part of the proceedings. They include the speaker's narration with video of the slides and animations. Most include full-text papers. Interactive, searchable transcripts and closed captioning are now available for most presentations.

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Conference Presentations

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8:55

26 November 2024

New applications on multi-beam mask writers to enable mask-making in 3nm and beyond

Ta Wei Ou, et al.

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25 November 2024

Recent advancements in microtomography

Bert Müller, et al.

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12:35

22 November 2024

Introducing TURBO: a 24-hour continuous turbulence monitor in Barcelona

Lily Beesley, et al.

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26:11

22 November 2024

Earth observation retrieval of high-resolution soil moisture: challenges and opportunities

F. Mattia, et al.

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16:25

22 November 2024

Demonstrating a line-of-sight optical dome turbulence monitor

James Osborn, et al.

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24:13

22 November 2024

ESA Scout HydroGNSS monitoring soil moisture and forest biomass

Nazzareno Pierdicca, et al.

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17:03

22 November 2024

34nm pitch orthogonal pillar patterning enabled by different mask geometries

H. Raut, et al.

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9:56

22 November 2024

Development of laser-assisted CD correction system in EUV masks

JongKeun Oh, et al.

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Plenaries & Keynotes

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25 November 2024

On the cusp of x-ray tomographic mapping of the human brain and its 10^11 cells

Bert Müller, et al.

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41:13

10 October 2024

On-chip learning with organic neuromorphic systems

Yoeri van de Burgt, et al.

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36:08

8 October 2024

Quantum nanoplasmonic coherent perfect absorption and plasmonic ‘hot-spot’ nanoheating of color centres for quantum operations at elevated temperatures

Ortwin Hess, et al.

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22:25

4 October 2024

Applications of tip-enhanced Raman spectroscopy and imaging

Renato Zenobi, et al.

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23:57

4 October 2024

Molecule polariton for chemical reactions at electrified interfaces

Tomohiro Fukushima, et al.

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24:40

4 October 2024

Strain-localized excitons and highly tunable nanocavity strong coupling in monolayer WSe2

P. James Schuck, et al.

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38:12

4 October 2024

Higher harmonic generation driven by E(t) from the Kerr index of refraction for the optical, NIR, and MIR femtosecond light pulses for the attosecond and zeptosecond pulse generation

Robert Alfano, et al.