Development of nano-imprint lithography template for fine feature hole layers of next generation devices

Koji Ichimura

doi:10.1117/12.2656138

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4 December 2024

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22 November 2024

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Plenaries & Keynotes

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25 November 2024

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Higher harmonic generation driven by E(t) from the Kerr index of refraction for the optical, NIR, and MIR femtosecond light pulses for the attosecond and zeptosecond pulse generation

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