Femtosecond lasers are available with an increasing energy per pulse. Their efficient exploitation without any decrease of quality is key. It could be done with beam-splitting and parallel processing. We present a fully reflective CANUNDA-SPLIT module used with a 100W 1030nm 500fs laser and a 100mm F-theta. The uniformity of the beams over the Field of View is presented. The drilling of stainless steel and Nickel cavities matrices, designed for tribological properties improvement, has been performed. The homogeneity of the cavities and the circularity are analyzed. These results paves the way to meter-scale area processing with a reduced processing time.

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Mahmoud Ziat, Yoan Di Maio, Pauline Jullian, Julien Granier, Gregory Egaud, Dmitry Nuzhdin, Ivan Gusachenko, Gwenn Pallier, Nicolas Compère, and Guillaume Labroille, "Tribological properties improvement of stainless steel and nickel samples at large scale thanks to beam splitting with a femtosecond laser," Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080L (Presented at SPIE LASE: February 01, 2023; Published: 17 March 2023); https://doi.org/10.1117/12.2655451.6321500986112.