Silicon microring resonator (Si-MRR) plays an essential role in the scalable wavelength division multiplexing (WDM) device due to its ultra-compact size and low energy consumption. Typically, the resonant wavelength of the Si-MRR is controlled via the thermal heater with high power dissipation. Recently, a tunable Si-MRR heterogeneously integrated with high mobility transparent conducting oxide (HMTCO)/hafnium oxide insulator/Si metal-oxide-semiconductor (MOS) capacitor has demonstrated an alternative method to electrically tune the working wavelength with negligible power consumption. This talk will demonstrate a WDM cascaded with four HMTCO gated MOS Si-MRRs and show the large wavelength tuning range with high power efficiency.

© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Wei-Che Hsu and Alan X. Wang, "Electrically tunable silicon microring resonator array for on-chip wavelength division multiplexing," Proc. SPIE PC12427, Optical Interconnects XXIII, PC124270B (Presented at SPIE OPTO: February 02, 2023; Published: 9 March 2023); https://doi.org/10.1117/12.2657971.6321505245112.