From Event: SPIE Advanced Lithography + Patterning, 2023
Polymer blending is a powerful approach to expand the nanopatterning landscape for block copolymer (BCP) directed self-assembly, itself a promising route to enhance resolution in established lithography techniques. However, investigating the vast and complex parameter spaces associated with blend self-assembly remains a daunting challenge. This talk will highlight examples where blending BCPs with homopolymers can dramatically speed up self-assembly kinetics for potential applications from nanophotonics to membrane synthesis, while blending two BCPs enables registered, template-responsive pattern selection. I will further describe ongoing efforts to accelerate investigations of blend formulation and processing using new combinatorial and autonomous methods.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gregory S. Doerk, Aaron Stein, Suwon Bae, Marcus Noack, Masafumi Fukuto, Ashish A. Kulkarni, Kristof Toth, Chinedum Osuji, and Kevin Yager, "Advancing the capabilities of polymer blend directed self-assembly," Proc. SPIE PC12497, Novel Patterning Technologies 2023, PC124970I (Presented at SPIE Advanced Lithography + Patterning: March 02, 2023; Published: 30 April 2023); https://doi.org/10.1117/12.2660507.6325349837112.