From Event: SPIE Advanced Lithography + Patterning, 2023
VCSEL technologies advances in Coherent Corp enabling new applications and performance. Integration of optics into VCSELs to allow beam shaping to enable better optics design and reduce package.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jason Tan, "Advances in VCSEL technologies and integrated optics," Proc. SPIE PC12499, Advanced Etch Technology and Process Integration for Nanopatterning XII, PC1249909 (Presented at SPIE Advanced Lithography + Patterning: March 01, 2023; Published: 30 April 2023); https://doi.org/10.1117/12.2663001.6325348270112.