PROCEEDINGS VOLUME 10385
SPIE OPTICAL ENGINEERING + APPLICATIONS | 6-10 AUGUST 2017
Advances in Metrology for X-Ray and EUV Optics VII
Proceedings Volume 10385 is from: Logo
SPIE OPTICAL ENGINEERING + APPLICATIONS
6-10 August 2017
San Diego, California, United States
Front Matter: Volume 10385
Proc. SPIE 10385, Front matter: Volume 10385, 1038501 (25 October 2017); doi: 10.1117/12.2297021
At-Wavelength Metrology
Proc. SPIE 10385, Single-grating Talbot imaging for wavefront sensing and x-ray metrology, 1038502 (7 September 2017); doi: 10.1117/12.2274023
Proc. SPIE 10385, Speckle-based portable device for in-situ metrology of x-ray mirrors at Diamond Light Source, 1038504 (7 September 2017); doi: 10.1117/12.2274780
Proc. SPIE 10385, Investigation of HF-plasma-treated soft x-ray optical elements, 1038505 (7 September 2017); doi: 10.1117/12.2272967
Metrology of VLS Gratings
Proc. SPIE 10385, Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry, 1038506 (7 September 2017); doi: 10.1117/12.2272616
Proc. SPIE 10385, Characterization of a 150-mm long variable line spacing plane grating through interferometry, 1038507 (7 September 2017); doi: 10.1117/12.2274214
Proc. SPIE 10385, Metrology of variable-line-spacing x-ray gratings using the APS Long Trace Profiler, 1038508 (7 September 2017); doi: 10.1117/12.2279053
Calibration and Nanoradian Metrology
Proc. SPIE 10385, Recent developments in nanoradian-angle metrology, 1038509 (7 September 2017); doi: 10.1117/12.2274192
Proc. SPIE 10385, A new ultra-high-accuracy angle generator: current status and future direction, 103850A (7 September 2017); doi: 10.1117/12.2274143
Proc. SPIE 10385, A portable device for calibration of autocollimators with nanoradian precision, 103850B (7 September 2017); doi: 10.1117/12.2274178
Metrology Facilities
Proc. SPIE 10385, A new optics metrology laboratory at CNPEM: metrology capabilities, performance, and future plans, 103850C (7 September 2017); doi: 10.1117/12.2274020
Proc. SPIE 10385, X-ray optics laboratory at the ALS: current capabilities, new challenges, and tasks for further development (Conference Presentation), 103850D (); doi: 10.1117/12.2275565
Proc. SPIE 10385, Status of the metrology laboratory for the LCLS II project (Conference Presentation), 103850E (); doi: 10.1117/12.2275562
Novel Instruments and Methods
Proc. SPIE 10385, Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics, 103850G (7 September 2017); doi: 10.1117/12.2273029
Proc. SPIE 10385, Surface slope metrology of highly curved x-ray optics with an interferometric microscope, 103850H (7 September 2017); doi: 10.1117/12.2274220
Proc. SPIE 10385, New twist in the optical schematic of surface slope measuring long trace profiler, 103850I (7 September 2017); doi: 10.1117/12.2274400
Stitching and Sub-Nanometer Surface Metrology
Proc. SPIE 10385, Development of relative angle determinable stitching interferometry for high-accuracy x-ray focusing mirrors, 103850M (7 September 2017); doi: 10.1117/12.2273793
Proc. SPIE 10385, Fizeau stitching at the European Synchrotron Radiation Facility (ESRF), 103850N (7 September 2017); doi: 10.1117/12.2274745
Proc. SPIE 10385, Three-dimensional shape measurement for x-ray ellipsoidal mirror, 103850O (7 September 2017); doi: 10.1117/12.2273666
Poster Session
Proc. SPIE 10385, X-ray multilayer mid-frequency characterizations using speckle scanning techniques, 103850Q (7 September 2017); doi: 10.1117/12.2272194
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