PROCEEDINGS VOLUME 1619
SPIE TECHNICAL: OPTCON '91 | 1-30 NOVEMBER 1991
Vibration Control in Microelectronics, Optics, and Metrology
SPIE TECHNICAL: OPTCON '91
1-30 November 1991
San Jose, CA, United States
Vibration Isolation: Passive and Active Systems
Proc. SPIE 1619, Matching performance requirements with technology: an applications approach to vibration isolation, 0000 (1 February 1992); doi: 10.1117/12.56819
Proc. SPIE 1619, Improved vibration isolation system for a scanning electron microscope, 0000 (1 February 1992); doi: 10.1117/12.56820
Proc. SPIE 1619, Recent advancements in passive and active vibration control systems, 0000 (1 February 1992); doi: 10.1117/12.56821
Proc. SPIE 1619, Secondary mirror chopping system for large infrared telescope, 0000 (1 February 1992); doi: 10.1117/12.56822
Proc. SPIE 1619, Negative-stiffness-mechanism vibration isolation systems, 0000 (1 February 1992); doi: 10.1117/12.56823
Vibration Monitoring Systems/Special Studies
Proc. SPIE 1619, Evaluation of acceptable levels and standards of vibration in relation to large telescopes and observatories, 0000 (1 February 1992); doi: 10.1117/12.56824
Vibration-Sensitve Equipment: Standards and Control
Proc. SPIE 1619, Factors in the design and selection of vibration-sensitive equipment, 0000 (1 February 1992); doi: 10.1117/12.56825
Proc. SPIE 1619, Generic criteria for vibration-sensitive equipment, 0000 (1 February 1992); doi: 10.1117/12.56826
Proc. SPIE 1619, Protecting vibration environments with zoning and land-use ordinances, 0000 (1 February 1992); doi: 10.1117/12.56827
Proc. SPIE 1619, Influence of bases and benches on the performance of vibration-sensitive equipment, 0000 (1 February 1992); doi: 10.1117/12.56828
Proc. SPIE 1619, New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope, 0000 (1 February 1992); doi: 10.1117/12.56829
Proc. SPIE 1619, Using wavelength change as a depth scanner to overcome the mechanical vibration in confocal scanning optical microscope, 0000 (1 February 1992); doi: 10.1117/12.56830
Design of Low-Vibration Facilities
Proc. SPIE 1619, Vibration considerations in the design of the Advanced Photon Source at Argonne National Laboratory, 0000 (1 February 1992); doi: 10.1117/12.56831
Proc. SPIE 1619, Influence of foundation design on environmental vibration, 0000 (1 February 1992); doi: 10.1117/12.56832
Proc. SPIE 1619, Stability and vibration control in synchrotron light source buildings, 0000 (1 February 1992); doi: 10.1117/12.56833
Proc. SPIE 1619, Site selection and design of a low-vibration building for submicron technology applications, 0000 (1 February 1992); doi: 10.1117/12.56834
Proc. SPIE 1619, Design for vibration control in microelectronics facilities, 0000 (1 February 1992); doi: 10.1117/12.56835
Soil, Foundation, and Floor Design Issues
Proc. SPIE 1619, Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology, 0000 (1 February 1992); doi: 10.1117/12.56836
Proc. SPIE 1619, Design of stiff, low-vibration floor structures, 0000 (1 February 1992); doi: 10.1117/12.56837
Proc. SPIE 1619, Effect of a viscoelastic admixture on transient vibration in a concrete and steel floor, 0000 (1 February 1992); doi: 10.1117/12.56838
Proc. SPIE 1619, Vibration control and isolation design for the Electrical Engineering/Computer Science Building, University of Minnesota--Minneapolis, Minnesota, 0000 (1 February 1992); doi: 10.1117/12.56839
Proc. SPIE 1619, Site selection considerations for scanning and transmission electron microscopes, 0000 (1 February 1992); doi: 10.1117/12.56840
Proc. SPIE 1619, Controlling horizontal microscale vibration in building floor entablatures, 0000 (1 February 1992); doi: 10.1117/12.56841
Proc. SPIE 1619, Study of ground effects on building foundation vibration using two-dimensional real-mode finite element analysis, 0000 (1 February 1992); doi: 10.1117/12.56842
Vibration Measurements: Transducers and Processing
Proc. SPIE 1619, Quantification of structural vibration and development of criteria: an introduction to IES draft standard RP-24, 0000 (1 February 1992); doi: 10.1117/12.56843
Proc. SPIE 1619, Review of several methods for processing vibration data, 0000 (1 February 1992); doi: 10.1117/12.56844
Proc. SPIE 1619, Accurate characterization of low-level vibration environments using seismological sensors and systems, 0000 (1 February 1992); doi: 10.1117/12.56845
Proc. SPIE 1619, Vibration measurement techniques for advanced test and manufacturing facilities, 0000 (1 February 1992); doi: 10.1117/12.56846
Proc. SPIE 1619, Remote recording of small vibrations of objects by a double-mode gas laser, 0000 (1 February 1992); doi: 10.1117/12.56847
Proc. SPIE 1619, Dynamic holographic vibrometry on photorefractive media, 0000 (1 February 1992); doi: 10.1117/12.56848
Vibration Monitoring Systems/Special Studies
Proc. SPIE 1619, Effective and well-proven condition monitoring system using portable and permanently installed instrumentation, 0000 (1 February 1992); doi: 10.1117/12.56849
Proc. SPIE 1619, Monitoring vibrations in microelectronics facilities, 0000 (1 February 1992); doi: 10.1117/12.56850
Proc. SPIE 1619, Microvibration monitoring: some recent experiences in an operating microelectronics facility, 0000 (1 February 1992); doi: 10.1117/12.56851
Proc. SPIE 1619, Continuous vibration monitoring system at an operating microelectronics fabrication plant, 0000 (1 February 1992); doi: 10.1117/12.56852
Proc. SPIE 1619, PC-based trending and analysis of floor vibration in sensitive fabrication areas, 0000 (1 February 1992); doi: 10.1117/12.56853
Proc. SPIE 1619, Achieving microradian accuracy with silicon position-sensitive detectors, 0000 (1 February 1992); doi: 10.1117/12.56854
Proc. SPIE 1619, Method to overcome the random factors in arranging a coherent bundle of optic fiber, 0000 (1 February 1992); doi: 10.1117/12.56855
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