PROCEEDINGS VOLUME 2045
OPTICS QUEBEC | 16-20 AUGUST 1993
Laser-Assisted Fabrication of Thin Films and Microstructures
OPTICS QUEBEC
16-20 August 1993
Quebec City, Canada
Fundamentals of Pulsed-Laser Deposition
Proc. SPIE 2045, Low-fluence laser excitation processes, 0000 (1 February 1994); doi: 10.1117/12.167540
Proc. SPIE 2045, Fundamental process during pulsed-laser deposition of thin films, 0000 (1 February 1994); doi: 10.1117/12.167549
Applications of Pulsed-Laser Deposition
Proc. SPIE 2045, Growth of 105k(BiPb)2Sr2Ca2Cu3O10 films on MgO by the pulsed laser deposition technique, 0000 (1 February 1994); doi: 10.1117/12.167573
Poster Session
Proc. SPIE 2045, Excitonic recombinations in Cd0.90Mn0.10Te/CdTe heterostructures grown by pulsed-laser evaporation and epitaxy, 0000 (1 February 1994); doi: 10.1117/12.167576
Proc. SPIE 2045, Laser processing of palladium for selective electroless copper plating, 0000 (1 February 1994); doi: 10.1117/12.167577
Laser Cleaning and Patterning
Proc. SPIE 2045, Excimer laser ablation of contaminated polyimide, 0000 (1 February 1994); doi: 10.1117/12.167578
Proc. SPIE 2045, Direct laser write-on exposure of thick film screens, 0000 (1 February 1994); doi: 10.1117/12.167541
Proc. SPIE 2045, Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist, 0000 (1 February 1994); doi: 10.1117/12.167542
Proc. SPIE 2045, Diode laser-induced pyrolytic decomposition of spin-coated organometallic thin films, 0000 (1 February 1994); doi: 10.1117/12.167543
Laser Writing
Proc. SPIE 2045, Continuous-wave laser-assisted fabrication of microstructures in silicon microelectronics, 0000 (1 February 1994); doi: 10.1117/12.167544
Proc. SPIE 2045, Excimer laser-induced metallization for Si and GaAs microelectronics, 0000 (1 February 1994); doi: 10.1117/12.167545
Proc. SPIE 2045, Laser fabrication of three-dimensional microstructures, cavities, and columns, 0000 (1 February 1994); doi: 10.1117/12.167546
Proc. SPIE 2045, Laser-beam writing for integrated-optic devices in Ti:LiNbO3, 0000 (1 February 1994); doi: 10.1117/12.167547
Applications of Laser Ablation
Proc. SPIE 2045, Structural and optical properties of semiconductor heterojunctions and superlattices grown by pulsed-laser evaporation and epitaxy, 0000 (1 February 1994); doi: 10.1117/12.167548
Proc. SPIE 2045, Surface patterning by an improved laser-induced forward transfer technique, 0000 (1 February 1994); doi: 10.1117/12.167550
Proc. SPIE 2045, Epitaxial growth of LiNbO3 optical-waveguide films by excimer laser ablation, 0000 (1 February 1994); doi: 10.1117/12.167551
Proc. SPIE 2045, Waveguide excimer laser fabrication of 3D microstructures, 0000 (1 February 1994); doi: 10.1117/12.167552
Poster Session
Proc. SPIE 2045, Manufacture of diffractive structures in metal and semiconductor thin films by pulse laser irradiation, 0000 (1 February 1994); doi: 10.1117/12.167553
Dielectric Photoformation
Proc. SPIE 2045, Synthesis of silicon-based dielectric films by excimer laser ablation, 0000 (1 February 1994); doi: 10.1117/12.167554
Proc. SPIE 2045, UV routes for approaching low temperature dielectrics deposition in III-V technology, 0000 (1 February 1994); doi: 10.1117/12.167555
Proc. SPIE 2045, Photo-CVD of dielectric materials by pseudo-continuous excimer sources, 0000 (1 February 1994); doi: 10.1117/12.167556
Laser Deposition
Proc. SPIE 2045, Laser microprocessing of diamond and diamond-like films, 0000 (1 February 1994); doi: 10.1117/12.167557
Poster Session
Proc. SPIE 2045, Holographic technique for HTS thin film patterning, 0000 (1 February 1994); doi: 10.1117/12.167558
Laser Surface Modifications
Proc. SPIE 2045, Laser-assisted deposition and etching of silicon for fabrication of refractive and diffractive optical elements, 0000 (1 February 1994); doi: 10.1117/12.167559
Proc. SPIE 2045, Iron silicide formation by excimer laser pulses, 0000 (1 February 1994); doi: 10.1117/12.167560
Proc. SPIE 2045, Laser-annealed thin-film fiber-optic temperature sensor, 0000 (1 February 1994); doi: 10.1117/12.167561
Proc. SPIE 2045, Laser beam direct writing of fine lines of alpha-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process, 0000 (1 February 1994); doi: 10.1117/12.167562
Fabrication of Microelectromechanical Structures, Devices, and Systems
Proc. SPIE 2045, Novel process for the fabrication of top-drive double stator micromotor on glass, 0000 (1 February 1994); doi: 10.1117/12.167563
Proc. SPIE 2045, Process planning and scheduling of micromachined transducer, 0000 (1 February 1994); doi: 10.1117/12.167564
Proc. SPIE 2045, Influence of the stress state in silicon on the anisotropic etching process, 0000 (1 February 1994); doi: 10.1117/12.167565
Proc. SPIE 2045, Hybrid fiber optic/silicon micromechanical sound-optical sensing system, 0000 (1 February 1994); doi: 10.1117/12.167566
Proc. SPIE 2045, Interferometric fiber optic accelerometer, 0000 (1 February 1994); doi: 10.1117/12.167567
Proc. SPIE 2045, Miniature integrated optic Fabry-Perot slit interferometer, 0000 (1 February 1994); doi: 10.1117/12.167568
Microstructures, Metallization, and Thick Photoresist Systems
Proc. SPIE 2045, Deep x-ray lithography for micromechanics, 0000 (1 February 1994); doi: 10.1117/12.167569
Proc. SPIE 2045, High aspect ratio resist structures for optoelectronic (and other) applications, 0000 (1 February 1994); doi: 10.1117/12.167570
Proc. SPIE 2045, Fabrication of perfectly three-dimensional microstructures by UV depth lithography, 0000 (1 February 1994); doi: 10.1117/12.167571
Proc. SPIE 2045, Synchrotron beamlines for x-ray lithography, 0000 (1 February 1994); doi: 10.1117/12.167572
Poster Session
Proc. SPIE 2045, Investigation of substrate temperature effect on the surface morphology of excimer laser deposited YBa2Cu3O7/CeO2 films on sapphire, 0000 (1 February 1994); doi: 10.1117/12.167574
Proc. SPIE 2045, Wavelength selection by an acousto-optical filter, 0000 (1 February 1994); doi: 10.1117/12.167575
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