PROCEEDINGS VOLUME 2088
LASER DIMENSIONAL METROLOGY: RECENT ADVANCES FOR INDUSTRIAL APPLICATION | 5-7 OCTOBER 1993
Laser Dimensional Metrology: Recent Advances for Industrial Application
IN THIS VOLUME

0 Sessions, 26 Papers, 0 Presentations
LASER DIMENSIONAL METROLOGY: RECENT ADVANCES FOR INDUSTRIAL APPLICATION
5-7 October 1993
Brighton, United Kingdom
Technology of Measurement
Proc. SPIE 2088, Trends in instrumentation for roughness and form measurement, 0000 (1 February 1993); doi: 10.1117/12.168063
Proc. SPIE 2088, Laser-beam scanning, 0000 (1 February 1993); doi: 10.1117/12.168071
Proc. SPIE 2088, Validation of assessment software in dimensional metrology, 0000 (1 February 1993); doi: 10.1117/12.168075
Proc. SPIE 2088, Adaptive optics, 0000 (1 February 1993); doi: 10.1117/12.168076
Components and Subsystems
Proc. SPIE 2088, Comparison of long-range and interferometric laser distance instruments using multiple reflections, 0000 (1 February 1993); doi: 10.1117/12.168077
Proc. SPIE 2088, High-power semiconductor lasers for lidar and sensing applications, 0000 (1 February 1993); doi: 10.1117/12.168078
Proc. SPIE 2088, Performance tests of an angular scan LED array-based range-imaging sensor, 0000 (1 February 1993); doi: 10.1117/12.168079
Proc. SPIE 2088, Investigations of bimorph adaptive mirrors, 0000 (1 February 1993); doi: 10.1117/12.168054
Trends in Industrial Metrology
Proc. SPIE 2088, Three-dimensional contouring by an optical radar system, 0000 (1 February 1993); doi: 10.1117/12.168055
Proc. SPIE 2088, Spatial metrology using shaped laser beams, 0000 (1 February 1993); doi: 10.1117/12.168056
Proc. SPIE 2088, Two- and three-dimensional laser scanners for fast dimensional measurements and inspection, 0000 (1 February 1993); doi: 10.1117/12.168057
Proc. SPIE 2088, On-line inspection of textile geometries, 0000 (1 February 1993); doi: 10.1117/12.168058
Proc. SPIE 2088, Automated calibration equipment for machine tools, 0000 (1 February 1993); doi: 10.1117/12.168059
Proc. SPIE 2088, Fibre optic shape-measuring system using phase-stepping speckle-pattern interferometry, 0000 (1 February 1993); doi: 10.1117/12.168060
Proc. SPIE 2088, Laser radar-based measuring systems for large scale assembly applications, 0000 (1 February 1993); doi: 10.1117/12.168061
Proc. SPIE 2088, Instruments for the automatic measurement of radius of curvature, 0000 (1 February 1993); doi: 10.1117/12.168062
Nanometrology Applications
Proc. SPIE 2088, Subnanometre precision closed-loop positioning for optics and X-Y stage control using capacitance displacement sensors and piezo-electric actuators, 0000 (1 February 1993); doi: 10.1117/12.168064
Proc. SPIE 2088, Novel algorithm for comparative measurement of submicrometre features on photomasks, 0000 (1 February 1993); doi: 10.1117/12.168065
Poster Session
Proc. SPIE 2088, New concept of optical super resolution, 0000 (1 February 1993); doi: 10.1117/12.168066
Nanometrology Applications
Proc. SPIE 2088, Absolute noncontacting method to characterize x-ray mirrors with large radii with nanometre accuracy, 0000 (1 February 1993); doi: 10.1117/12.168067
Proc. SPIE 2088, New design of an optical profiler, 0000 (1 February 1993); doi: 10.1117/12.168068
Proc. SPIE 2088, Measurement of the linear thermal expansion coefficient of gauge blocks by interferometry, 0000 (1 February 1993); doi: 10.1117/12.168069
Proc. SPIE 2088, High-speed optical measurement of 3-D surfaces, 0000 (1 February 1993); doi: 10.1117/12.168070
Poster Session
Proc. SPIE 2088, Dispersion-free Fabry-Perot interferometer for measuring very small displacements, 0000 (1 February 1993); doi: 10.1117/12.168072
Nanometrology Applications
Proc. SPIE 2088, New interferometric profiler for smooth and rough surfaces, 0000 (1 February 1993); doi: 10.1117/12.168073
Trends in Industrial Metrology
Proc. SPIE 2088, On-line particle size and velocity measurements by the analysis of defocused images: extended depth of field, 0000 (1 February 1993); doi: 10.1117/12.168074
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