Diagnostics and Modeling of Laser Ablation Deposition
Proc. SPIE 2403, Surface excitation mediated physics in low-fluence laser material interactions and applications to thin-film material processing, 0000 (10 April 1995); doi: 10.1117/12.206247
Proc. SPIE 2403, Laser-ablation-plume thermalization dynamics in background gases studied by time-resolved imaging, spectroscopic, and ion probe diagnostics, 0000 (10 April 1995); doi: 10.1117/12.206256
Proc. SPIE 2403, Imaging and modeling of pulsed-laser thin-film-deposition plumes, 0000 (10 April 1995); doi: 10.1117/12.206267
Proc. SPIE 2403, Planar laser-induced fluorescence imaging of Si and SiO during pulsed laser ablation of Si, 0000 (10 April 1995); doi: 10.1117/12.206278
Laser Monitoring of Thin Film Growth
Proc. SPIE 2403, In-situ single-wavelength fast-nulling ellipsometric measurements on CdTe-Cd1-xMnxTe quantum well and superlattice structures grown by pulsed-laser evaporation and epitaxy, 0000 (10 April 1995); doi: 10.1117/12.206291
Laser Ablation Deposition
Proc. SPIE 2403, Pulsed laser processing of epitaxial TiN/Si heterostructures, 0000 (10 April 1995); doi: 10.1117/12.206292
Applications of Pulsed Laser Deposition: Diamond-Like Films and Optical Coatings
Proc. SPIE 2403, Application of pulsed-laser-deposited amorphic diamond films in protective coatings and field-emission displays, 0000 (10 April 1995); doi: 10.1117/12.206293
Laser Ablation Deposition
Proc. SPIE 2403, Fabrication of zinc oxide, titanium oxide, and organic-entrapped-silica thin films via laser-assisted molecular beam deposition, 0000 (10 April 1995); doi: 10.1117/12.206248
Applications of Pulsed Laser Deposition: Diamond-Like Films and Optical Coatings
Proc. SPIE 2403, Properties of laser-ablated amorphous carbon films, 0000 (10 April 1995); doi: 10.1117/12.206249
Applications of Pulsed Laser Deposition: Photovoltaic Materials
Proc. SPIE 2403, Laser processing for thin-film photovoltaics, 0000 (10 April 1995); doi: 10.1117/12.206250
Laser Ablation Deposition
Proc. SPIE 2403, Deposition of silicon carbide thin films by pulsed-excimer-laser ablation technique in the (25-700)degree C deposition temperature range, 0000 (10 April 1995); doi: 10.1117/12.206251
Applications of Pulsed Laser Deposition: Diamond-Like Films and Optical Coatings
Proc. SPIE 2403, Deposition of optical coatings by pulsed laser ablation, 0000 (10 April 1995); doi: 10.1117/12.206252
Laser Ablation Deposition
Proc. SPIE 2403, Active microwave device applications of ferroelectric thin films, 0000 (10 April 1995); doi: 10.1117/12.206253
Applications of Pulsed Laser Deposition: Photovoltaic Materials
Proc. SPIE 2403, Raman scattering investigations of CuInSe2 films deposited by coevaporation and laser ablation, 0000 (10 April 1995); doi: 10.1117/12.206254
Proc. SPIE 2403, Pulsed laser deposition for CdTe-based photovoltaics, 0000 (10 April 1995); doi: 10.1117/12.206255
Proc. SPIE 2403, Low-temperature photoluminescence in In-doped CdMnTe/CdTe quantum wells and superlattices, 0000 (10 April 1995); doi: 10.1117/12.206257
UV Photon-Assisted Deposition of Thin Films
Proc. SPIE 2403, Excimer-laser-beam-scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors, 0000 (10 April 1995); doi: 10.1117/12.206258
Proc. SPIE 2403, Laser processing of thin films for optoelectronic devices, 0000 (10 April 1995); doi: 10.1117/12.206259
Proc. SPIE 2403, New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition, 0000 (10 April 1995); doi: 10.1117/12.206260
Proc. SPIE 2403, Characterization of excimer lamp photo-deposited ultrathin oxynitride films, 0000 (10 April 1995); doi: 10.1117/12.206261
Diagnostics and Modeling of Laser Ablation Deposition
Proc. SPIE 2403, Electron-beam diagnostic of an impulsive plume, 0000 (10 April 1995); doi: 10.1117/12.206262
Proc. SPIE 2403, Mass spectrometric study of gas-phase oxidation reactions during laser ablation of YBaCuO, 0000 (10 April 1995); doi: 10.1117/12.206263
Proc. SPIE 2403, Dynamics of laser ablation of YBaCuO superconductor: effect of ionization/recombination processes, 0000 (10 April 1995); doi: 10.1117/12.206264
Proc. SPIE 2403, Modeling of laser-induced plume expansion into ambient gas for thin film deposition, 0000 (10 April 1995); doi: 10.1117/12.206265
Laser-Assisted Etching and 3D Structuring
Proc. SPIE 2403, Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method, 0000 (10 April 1995); doi: 10.1117/12.206266
Proc. SPIE 2403, Laser-assisted etching for micropatterning of InP, 0000 (10 April 1995); doi: 10.1117/12.206268
Laser-Induced Surface Modification and Laser Synthesis
Proc. SPIE 2403, Information recording by laser ablation, 0000 (10 April 1995); doi: 10.1117/12.206269
Applications of Pulsed Laser Deposition: Photovoltaic Materials
Proc. SPIE 2403, Photoreflectance and photoluminescence spectroscopies of In-doped CdMnTe/CdTe multiple quantum wells and superlattices, 0000 (10 April 1995); doi: 10.1117/12.206270
Diagnostics and Modeling of Laser Ablation Deposition
Proc. SPIE 2403, Monte Carlo simulations of reactive pulsed laser deposition, 0000 (10 April 1995); doi: 10.1117/12.206271
Laser-Assisted Etching and 3D Structuring
Proc. SPIE 2403, Laser chemical etching of copper films, 0000 (10 April 1995); doi: 10.1117/12.206272
Laser-Induced Surface Modification and Laser Synthesis
Proc. SPIE 2403, Realization of Si1-x-yGexCy/Si heterostructures by pulsed-laser-induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100), 0000 (10 April 1995); doi: 10.1117/12.206273
Laser Ablation Deposition
Proc. SPIE 2403, Precursor preparation for mercury alkaline-earth cuprate films by pulsed laser deposition, 0000 (10 April 1995); doi: 10.1117/12.206274
Proc. SPIE 2403, Laser ablation synthesis of multilayered oxides with applications for catalysis modeling, 0000 (10 April 1995); doi: 10.1117/12.206275
Laser Microstructuring, Etching, and Annealing
Proc. SPIE 2403, Femtosecond-pulse laser processing of metallic and semiconducting thin films, 0000 (10 April 1995); doi: 10.1117/12.206276
Laser-Induced Surface Modification and Laser Synthesis
Proc. SPIE 2403, Alumina-gamma-phase excimer laser synthesis: phenomenology of the process and properties of the material, 0000 (10 April 1995); doi: 10.1117/12.206277
Proc. SPIE 2403, Laser-induced surface modification and metallization of polymers, 0000 (10 April 1995); doi: 10.1117/12.206279
Proc. SPIE 2403, Thermal processes in Write Once Read Many times (WORM) recording media during sublimation, 0000 (10 April 1995); doi: 10.1117/12.206280
Laser-Assisted Etching and 3D Structuring
Proc. SPIE 2403, Laser sources and laser-induced processing of micro 3D structures, 0000 (10 April 1995); doi: 10.1117/12.206281
Proc. SPIE 2403, Microwave-assisted laser dry etching of silicon, 0000 (10 April 1995); doi: 10.1117/12.206282
Proc. SPIE 2403, Utilization of surface electromagnetic wave excitation for increase of submicron diffraction grating depth on n-InP fabricated by holographic wet etching, 0000 (10 April 1995); doi: 10.1117/12.206283
Laser Microstructuring, Etching, and Annealing
Proc. SPIE 2403, Computer-generated holographic diffractive structures fabricated by direct excimer laser microetching, 0000 (10 April 1995); doi: 10.1117/12.206284
Proc. SPIE 2403, Control of defect complex formation in thermally quenched semi-insulating GaAs using capless laser processing, 0000 (10 April 1995); doi: 10.1117/12.206285
Proc. SPIE 2403, Photoluminescence of porous silicon layers produced with the help of laser radiation, 0000 (10 April 1995); doi: 10.1117/12.206286
Proc. SPIE 2403, Resonant excitation of periodic surface structures by a moving laser beam, 0000 (10 April 1995); doi: 10.1117/12.206287
Laser Monitoring of Thin Film Growth
Proc. SPIE 2403, Laser reflectometry for in-situ monitoring of the epitaxial growth of thin films, 0000 (10 April 1995); doi: 10.1117/12.206288
Laser-Induced Surface Modification and Laser Synthesis
Proc. SPIE 2403, Laser-induced surface modifications, structure formation, and ablation of organic polymers, 0000 (10 April 1995); doi: 10.1117/12.206289
Diagnostics and Modeling of Laser Ablation Deposition
Proc. SPIE 2403, Multidimensional dynamics of laser-ablated materials, 0000 (10 April 1995); doi: 10.1117/12.206290
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