PROCEEDINGS VOLUME 2621
15TH ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY AND MANAGEMENT '95 | 20-22 SEPTEMBER 1995
15th Annual BACUS Symposium on Photomask Technology and Management
Editor Affiliations +
15TH ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY AND MANAGEMENT '95
20-22 September 1995
Santa Clara, CA, United States
Photomask Pattern Generation
Christie R. Marrian, Steven Chang, Martin C. Peckerar
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228169
Brian J. Grenon, D. C. Defibaugh, Donna M. Sprout, C. J. Taft
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228180
Jim DeWitt, Joe Watson, David W. Alexander, Allen Cook, Leonard Gasiorek, Mark Mayse, Robert J. Naber, Wayne Phillips, Charles A. Sauer
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228189
David M. Walker, Sheldon M. Kugelmass, K. A. Murray, C. M. Rose
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228200
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228207
Photomask Resist and Process
Charles A. Sauer, Robert L. Dean, Etsuya Morita, Zoilo C. H. Tan, Bruce W. Smith, Dale E. Ewbank, Sid P. Duttagupta, Anne Rudack
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228215
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228216
Hideo Kobayashi, Keishi Asakawa, Yasunori Yokoya
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228217
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228160
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228161
Inspection and Repair
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228162
Tsuneyuki Hagiwara
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228163
Rosanne LaVoy, Ron Fujioka
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228164
James A. Reynolds, Franklin M. Schellenberg
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228165
Pei-yang Yan, Qi-De Qian, Joan McCall, Joseph C. Langston, Yu S. Ger, Joe S. Cho, Robert F. Hainsey
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228166
Metrology
Chris Bishop, Al Strott
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228167
Andrew D. Pond
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228168
Steve L. Hentschel, Henry H. Kamberian, Julius Kovatch
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228170
Henry Chris Hamaker
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228171
Jim DeWitt, Joe Watson, Thomas P. Coleman, Leonard Gasiorek, Michael D. Lubin, Robert J. Naber, William Wang, Keith Wires
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228172
Advanced Topics in Photomasks
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228173
Larry Gardner, Al Strott
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228174
John Charles Wolfe, Alex R. Shimkunas, John Melngailis, Hans Loeschner, Robert D. Mohondro, John N. Randall
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228175
Harold A. Huggins, Kevin J. Bolan, James Alexander Liddle, Milton L. Peabody Jr., Regine G. Tarascon-Auriol, David L. Windt
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228176
Graciela R. Guel, Martin Boothman, Daniel R. Rector, Susan M. Wilson
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228177
Addtional Paper
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228178
Phase-Shifting Masks
Yoshiro Yamada, Hiromasa Unno, Kazuaki Chiba, Eisei Karikawa, Yasutaka Kikuchi, Yusuke Hattori, Katsuhiro Kinemura
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228179
Rajeev R. Singh, Alvina M. Williams, Chi-Min Yuan, Greg P. Hughes, G. Foss, Ronald M. Martino
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228181
In-Gyun Shin, Sung-Chul Lim, Sang-Gyun Woo, Woo-Sung Han, Young-Bum Koh
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228182
Suigen Kyoh, Hideaki Sakurai, Takayuki Iwamatsu, Iwao Higashikawa, Rikiya Taniguchi, Hidehiro Watanabe, Takashi Tuchiya
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228183
Poster Session
Torbjoern Sandstrom, Leif Odselius
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228184
Henry Chris Hamaker, Gary A. Burns, Peter D. Buck
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228185
Larry C. Davis, Christopher J. Goetz, Larry J. Watson
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228186
Jongwook Kye, Seong-Yong Moon, Sang-Gyun Woo, Woo-Sung Han, Young-Bum Koh
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228187
Pei-yang Yan, Joan McCall, Robert F. Hainsey
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228188
James L. Speidell, Doris Pulaski, Rajesh S. Patel
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228190
Doris Pulaski, Rajesh S. Patel, James L. Speidell
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228191
Robert L. Dean, Charles A. Sauer
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228192
Yuli Vladimirsky, Olga Vladimirsky, Volker Saile, Kevin J. Morris, J. Michael Klopf
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228193
Shyi-Long Shy, Tien Sheng Chao, C. H. Chu, Tan Fu Lei, Kazumitsu Nakamura, Wen-An Loong, Chun-Yen Chang
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228194
Shyi-Long Shy, Tan Fu Lei, Kazumitsu Nakamura, Wen-An Loong, Chun-Yen Chang
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228195
Damayanti C. Gharpure, Sunil K. David
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228196
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228197
Ichiro Kagami, Minoru Sugawara, Hiroichi Kawahira, Keisuke Tsudaka, Kiichi Ishikawa, Satoru Nozawa
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228198
Minoru Sugawara, Kiichi Ishikawa, Hiroichi Kawahira, Ichiro Kagami, Satoru Nozawa
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228199
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228201
Yasunori Yokoya, Hideo Kobayashi, Keishi Asakawa
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228202
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228203
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228204
Weidong Liu, Roger Fabian W. Pease
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228205
Greg Booi
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228206
The Optimum Solution: OPC and Beyond
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228208
Manabu Tomita, Hidetoshi Ohnuma, Masaaki Koyama, Hiroichi Kawahira
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228209
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228210
Robert P. Bishop
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228211
Oberdan W. Otto, Joseph G. Garofalo, Richard C. Henderson
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228212
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228213
Proceedings Volume 15th Annual BACUS Symposium on Photomask Technology and Management, (1995) https://doi.org/10.1117/12.228214
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