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Investigation of metal contamination by photocurrent measurements: validation and application to ion implantation processes
Scanning photon microscope based on ac surface photovoltage: applications to nondestructive evaluation of metallic contaminants in silicon wafers
Influence of oxygen-iron interaction on the external gettering of Fe in p-Si by polycrystalline silicon film
Surface photovoltage analysis of iron contamination in silicon processing and the relation to gate oxide integrity
Performance optimization of three-dimensional optoelectronic interconnection for intra-multi-chip-module clock signal distribution
Evaluation of near-surface microdefects in Czochralski-Si wafers after a CMOS process by an infrared interference method