PROCEEDINGS VOLUME 2642
MICROMACHINING AND MICROFABRICATION | 23-25 OCTOBER 1995
Micromachined Devices and Components
MICROMACHINING AND MICROFABRICATION
23-25 October 1995
Austin, TX, United States
Actuators and Mechanical Devices I
Proc. SPIE 2642, Thermal microactuators for surface-micromachining processes, 0000 (15 September 1995); doi: 10.1117/12.221154
Proc. SPIE 2642, Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process, 0000 (15 September 1995); doi: 10.1117/12.221166
Proc. SPIE 2642, Three-dimensional structures for micro-optical mechanical systems in standard CMOS, 0000 (15 September 1995); doi: 10.1117/12.221176
Proc. SPIE 2642, Measurement of static friction in mechanical couplings of articulated microrobots, 0000 (15 September 1995); doi: 10.1117/12.221182
Actuators and Mechanical Devices II
Proc. SPIE 2642, Measured forces and displacements of integrated force arrays, 0000 (15 September 1995); doi: 10.1117/12.221183
Proc. SPIE 2642, Design, fabrication, and characterization of electrostatic microrelays, 0000 (15 September 1995); doi: 10.1117/12.221184
Proc. SPIE 2642, Silicon membrane gyroscope with electrostatic actuation and sensing, 0000 (15 September 1995); doi: 10.1117/12.221185
Proc. SPIE 2642, Thick-polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation, 0000 (15 September 1995); doi: 10.1117/12.221186
Proc. SPIE 2642, Monolithic multiple axis accelerometer design in standard CMOS, 0000 (15 September 1995); doi: 10.1117/12.221155
Chemical and Biological Sensors
Proc. SPIE 2642, Chemical gas sensors on silicon, 0000 (15 September 1995); doi: 10.1117/12.221158
Proc. SPIE 2642, Silicon micromachined gas chromatographic system (SMGCS) for directly separating binary fugitive emissions of ammonia (NH3) and nitrigen dioxide (NO2), 0000 (15 September 1995); doi: 10.1117/12.221159
Proc. SPIE 2642, Micromachined hydrocarbon-based gas sensors, 0000 (15 September 1995); doi: 10.1117/12.221160
Proc. SPIE 2642, Heart cell contractions measured using a micromachined polysilicon force transducer, 0000 (15 September 1995); doi: 10.1117/12.221161
Proc. SPIE 2642, Microfabricated sensors for the measurement of electromagnetic fields in biological tissues, 0000 (15 September 1995); doi: 10.1117/12.221162
Flow and Electromagnetic Devices
Proc. SPIE 2642, Static micromixer built up in silicon, 0000 (15 September 1995); doi: 10.1117/12.221163
Proc. SPIE 2642, Rapid prototyping of a micro pump with laser micromachining, 0000 (15 September 1995); doi: 10.1117/12.221164
Proc. SPIE 2642, Smart electronics and MEMS for aerospace structures, 0000 (15 September 1995); doi: 10.1117/12.221165
Proc. SPIE 2642, Design of an inductive proximity sensor using a two-coil planar transformer, 0000 (15 September 1995); doi: 10.1117/12.221167
Proc. SPIE 2642, Multiaxis microcoil sensors in standard CMOS, 0000 (15 September 1995); doi: 10.1117/12.221168
Modeling
Proc. SPIE 2642, Finite element modeling microelectromechanical structures for sensing applications, 0000 (15 September 1995); doi: 10.1117/12.221169
Proc. SPIE 2642, Linearization techniques for capacitive sensors, 0000 (15 September 1995); doi: 10.1117/12.221170
Proc. SPIE 2642, CAD framework concept for the design of integrated microsystems, 0000 (15 September 1995); doi: 10.1117/12.221171
Proc. SPIE 2642, Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator, 0000 (15 September 1995); doi: 10.1117/12.221172
Proc. SPIE 2642, Finite element modeling of the dynamic response of a MEMS sensor, 0000 (15 September 1995); doi: 10.1117/12.221173
Pressure Sensors and Packaging
Proc. SPIE 2642, Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects, 0000 (15 September 1995); doi: 10.1117/12.221174
Proc. SPIE 2642, ARROW-based integrated optical pressure sensors, 0000 (15 September 1995); doi: 10.1117/12.221175
Proc. SPIE 2642, Characterization of a surface micromachined pressure sensor array, 0000 (15 September 1995); doi: 10.1117/12.221177
Proc. SPIE 2642, Effect of machine parameters on polymer die attach dispense and a method to optimize them, 0000 (15 September 1995); doi: 10.1117/12.221178
Proc. SPIE 2642, Packaging of MEMS devices, 0000 (15 September 1995); doi: 10.1117/12.221179
Poster Session
Proc. SPIE 2642, Biodriven microsystem for treatment of hydrocephalus, 0000 (15 September 1995); doi: 10.1117/12.221180
Proc. SPIE 2642, 3DuV: a MEMS 3D visualization package, 0000 (15 September 1995); doi: 10.1117/12.221181
Plenary Papers
Proc. SPIE 2642, Projection displays and MEMS: timely convergence for a bright future, 0000 (15 September 1995); doi: 10.1117/12.221156
Proc. SPIE 2642, Recent trends in silicon micromachining technology, 0000 (15 September 1995); doi: 10.1117/12.221157
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