PROCEEDINGS VOLUME 2783
LASERS, OPTICS, AND VISION FOR PRODUCTIVITY IN MANUFACTURING I | 10-14 JUNE 1996
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
LASERS, OPTICS, AND VISION FOR PRODUCTIVITY IN MANUFACTURING I
10-14 June 1996
Besancon, France
Plenary Paper
Proc. SPIE 2783, Digital Light Processing and MEMS: reflecting the digital display needs of the networked society, 0000 (26 August 1996); doi: 10.1117/12.248477
Integrated and Mirror-Optic Technologies, Components, and Applications
Proc. SPIE 2783, Microlasers: key components for optical microsystems, 0000 (26 August 1996); doi: 10.1117/12.248488
Proc. SPIE 2783, Impact of diffractive optics on the design of optical pick up, 0000 (26 August 1996); doi: 10.1117/12.248498
Proc. SPIE 2783, Active and passive optical components using liquid crystals, 0000 (26 August 1996); doi: 10.1117/12.248507
Proc. SPIE 2783, Stabilized microchip lasers fabricated by micro-optical technologies, 0000 (26 August 1996); doi: 10.1117/12.248508
Proc. SPIE 2783, Micro-optical devices based on free-space optics with LIGA micro-optical benches: examples and perspectives, 0000 (26 August 1996); doi: 10.1117/12.248509
Proc. SPIE 2783, Micro-optics for sensor applications, 0000 (26 August 1996); doi: 10.1117/12.248510
Proc. SPIE 2783, Carbon super tips on AFM probes as near-field PSTM sensors, 0000 (26 August 1996); doi: 10.1117/12.248511
Assembling Hybridization Techniques
Proc. SPIE 2783, Glass wafer direct bonding: a new technology for monomode optical integrated devices, 0000 (26 August 1996); doi: 10.1117/12.248512
Proc. SPIE 2783, Assembly and interconnection technologies for electrical and optical microsystems, 0000 (26 August 1996); doi: 10.1117/12.248478
Proc. SPIE 2783, Absolute measurement of the fiber to waveguide distance during a coupling process by low-coherence interferometry, 0000 (26 August 1996); doi: 10.1117/12.248479
Proc. SPIE 2783, Mounting, cementing, and handling of micro-optical elements, 0000 (26 August 1996); doi: 10.1117/12.248480
Proc. SPIE 2783, Integrated motion system for self-alignment of micro-optical devices, 0000 (26 August 1996); doi: 10.1117/12.248481
Micromechanical Devices
Proc. SPIE 2783, Beam steering without moving parts, 0000 (26 August 1996); doi: 10.1117/12.248482
Proc. SPIE 2783, Challenges of a Digital Micromirror Device: modeling and design, 0000 (26 August 1996); doi: 10.1117/12.248483
Proc. SPIE 2783, Micro-optical beam deflectors and modulators: present state of development, 0000 (26 August 1996); doi: 10.1117/12.248484
Proc. SPIE 2783, Micro-optomechanical devices: an electrostatically actuated bending waveguide for optical coupling, 0000 (26 August 1996); doi: 10.1117/12.248485
Proc. SPIE 2783, Microactuator for microwave antennas, 0000 (26 August 1996); doi: 10.1117/12.248486
Displacement Encoders
Proc. SPIE 2783, High-resolution position encoder insensitive to misalignment, 0000 (26 August 1996); doi: 10.1117/12.248487
Proc. SPIE 2783, High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode, 0000 (26 August 1996); doi: 10.1117/12.248489
Proc. SPIE 2783, Feedback interferometry with semiconductor laser for high-resolution displacement sensing, 0000 (26 August 1996); doi: 10.1117/12.248490
Proc. SPIE 2783, New high-resolution displacement sensor based on surface plasmon resonance, 0000 (26 August 1996); doi: 10.1117/12.248491
Proc. SPIE 2783, High-resolution absolute position detection using a multiple grating, 0000 (26 August 1996); doi: 10.1117/12.248492
Optical Sensors and Microsystems
Proc. SPIE 2783, Smart image sensors: an emerging key technology for advanced optical measurement and microsystems, 0000 (26 August 1996); doi: 10.1117/12.248493
Proc. SPIE 2783, Photonic microsystems based on artificial retinas, 0000 (26 August 1996); doi: 10.1117/12.248494
Proc. SPIE 2783, Integrated optical interferometers for refractometry and chemical sensing, 0000 (26 August 1996); doi: 10.1117/12.248495
Proc. SPIE 2783, Microspectrometer for the infrared range, 0000 (26 August 1996); doi: 10.1117/12.248496
Proc. SPIE 2783, High-resolution real-time adaptive optic microsensor for residual stress and vibration measurement in situ, 0000 (26 August 1996); doi: 10.1117/12.248497
Proc. SPIE 2783, Optimizing the optics for evanescent wave analysis with laser diodes (EWALD) for monitoring chlorinated hydrocarbons in water, 0000 (26 August 1996); doi: 10.1117/12.248499
Proc. SPIE 2783, Length-division-sensitive birefringent fiber FMCW remote strain sensor, 0000 (26 August 1996); doi: 10.1117/12.248500
Proc. SPIE 2783, FMCW birefringent fiber strain sensor with two forward-coupled beams, 0000 (26 August 1996); doi: 10.1117/12.248501
Proc. SPIE 2783, Range imaging sensor with no moving parts, 0000 (26 August 1996); doi: 10.1117/12.248502
Displacement Encoders
Proc. SPIE 2783, New integrated optics displacement sensor in glass, 0000 (26 August 1996); doi: 10.1117/12.248503
Micromechanical Devices
Proc. SPIE 2783, E-beam tandem writes short-pitch DOEs and gratings for EU-922 FOTA and other optical microsystems, 0000 (26 August 1996); doi: 10.1117/12.248504
Optical Sensors and Microsystems
Proc. SPIE 2783, Replication of micro-optical profiles in ORMOCER and other polymers, 0000 (26 August 1996); doi: 10.1117/12.248505
Integrated and Mirror-Optic Technologies, Components, and Applications
Proc. SPIE 2783, One-level gray-tone lithography: mask data preparation and pattern transfer, 0000 (26 August 1996); doi: 10.1117/12.248506
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