PROCEEDINGS VOLUME 2881
MICROMACHINING AND MICROFABRICATION '96 | 14-15 OCTOBER 1996
Microelectronic Structures and MEMS for Optical Processing II
IN THIS VOLUME

0 Sessions, 21 Papers, 0 Presentations
MOEM Divices  (6)
MICROMACHINING AND MICROFABRICATION '96
14-15 October 1996
Austin, TX, United States
MEM Micromirrors
Proc. SPIE 2881, Control of a phase-locked laser diode array using piston micromirrors, 0000 (23 September 1996); doi: 10.1117/12.251241
Proc. SPIE 2881, Statistical performance evaluation of electrostatic micro actuators for a deformable mirror, 0000 (23 September 1996); doi: 10.1117/12.251251
Proc. SPIE 2881, Reflectivity of micromachined {111}-oriented silicon mirrors for optical input/output couplers, 0000 (23 September 1996); doi: 10.1117/12.251255
Proc. SPIE 2881, Micromirrors with single crystal silicon support structures, 0000 (23 September 1996); doi: 10.1117/12.251256
Proc. SPIE 2881, Micromirror arrays for coherent beam steering and phase control, 0000 (23 September 1996); doi: 10.1117/12.251257
Proc. SPIE 2881, Linear array of CMOS double pass metal micromirrors, 0000 (23 September 1996); doi: 10.1117/12.251258
MOEM Divices
Proc. SPIE 2881, On-chip optical processing, 0000 (23 September 1996); doi: 10.1117/12.251259
Proc. SPIE 2881, Fabrication of optomechanical structures suitable for microwave phase conjugation, 0000 (23 September 1996); doi: 10.1117/12.251260
Proc. SPIE 2881, Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems, 0000 (23 September 1996); doi: 10.1117/12.251261
Proc. SPIE 2881, New remote gas infrared optical fiber sensor, 0000 (23 September 1996); doi: 10.1117/12.251242
Proc. SPIE 2881, Switchable Fresnel zone lenses for optical interconnections, 0000 (23 September 1996); doi: 10.1117/12.251243
Proc. SPIE 2881, Fabrication of micromechanical and optical components by ultraprecision cutting, 0000 (23 September 1996); doi: 10.1117/12.251244
Materials Characterization and Optical Sensors
Proc. SPIE 2881, Tradeoffs in MEMS materials, 0000 (23 September 1996); doi: 10.1117/12.251245
Proc. SPIE 2881, Fabrication and characterization of a Fabry-Perot-based chemical sensor, 0000 (23 September 1996); doi: 10.1117/12.251246
Additional Paper
Proc. SPIE 2881, MEMS for measuring deflection and deicing of helicopter rotors, 0000 (23 September 1996); doi: 10.1117/12.251247
Materials Characterization and Optical Sensors
Proc. SPIE 2881, Diffraction device for real-time recognizing and tracing the moving target, 0000 (23 September 1996); doi: 10.1117/12.251248
CRT and LCD Devices
Proc. SPIE 2881, Optical polarization mode converter based on twist nematic liquid crystal (TNLC), 0000 (23 September 1996); doi: 10.1117/12.251249
Proc. SPIE 2881, Bonding techniques for single crystal TFT AMLCDs, 0000 (23 September 1996); doi: 10.1117/12.251250
Proc. SPIE 2881, Analysis of field-emitter efficiency variations with geometry, 0000 (23 September 1996); doi: 10.1117/12.251252
Plenary Papers
Proc. SPIE 2881, Application of micromachining technology to optical devices and systems, 0000 (23 September 1996); doi: 10.1117/12.251253
Proc. SPIE 2881, Commercializing MEMS--too fast or too slow?, 0000 (23 September 1996); doi: 10.1117/12.251254
Back to Top