PROCEEDINGS VOLUME 2882
MICROMACHINING AND MICROFABRICATION '96 | 14-15 OCTOBER 1996
Micromachined Devices and Components II
MICROMACHINING AND MICROFABRICATION '96
14-15 October 1996
Austin, TX, United States
Integrated Microdevices and Microsystems
Proc. SPIE 2882, New developments in the integration of micromachined sensors, 0000 (17 September 1996); doi: 10.1117/12.250693
Proc. SPIE 2882, Compatible CMOS microsystems for automotive and medical applications, 0000 (17 September 1996); doi: 10.1117/12.250703
Proc. SPIE 2882, Stacked multichip-module technology for high-performance intelligent transducers, 0000 (17 September 1996); doi: 10.1117/12.250712
Proc. SPIE 2882, Thermopneumatical micropump and microvalves for a medical analyzing system, 0000 (17 September 1996); doi: 10.1117/12.250720
Proc. SPIE 2882, Applications of bipolar compatible epitaxial polysilicon, 0000 (17 September 1996); doi: 10.1117/12.250723
Chemical Sensors
Proc. SPIE 2882, Silicon integrated microsensor incorporating a metal-doped phthalocyanine organic semiconductor used to selectively detect nitrogen dioxide and an organophosphorus compound, 0000 (17 September 1996); doi: 10.1117/12.250724
Proc. SPIE 2882, Deflection behavior of Fabry-Perot pressure sensors having planar and corrugated membrane, 0000 (17 September 1996); doi: 10.1117/12.250725
Proc. SPIE 2882, Technologies and microstructures for separation techniques in chemical analysis, 0000 (17 September 1996); doi: 10.1117/12.250726
Infrared Sensors
Proc. SPIE 2882, Antenna-coupled rectifying diode for IR detection, 0000 (17 September 1996); doi: 10.1117/12.250727
Proc. SPIE 2882, Micromachined VO2-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics, 0000 (17 September 1996); doi: 10.1117/12.250694
Proc. SPIE 2882, Optimization of CMOS infrared detector microsystems, 0000 (17 September 1996); doi: 10.1117/12.250695
Accelerometers and Gyroscopes
Proc. SPIE 2882, Silicon accelerometers: generic design and operating principles and a case study, 0000 (17 September 1996); doi: 10.1117/12.250696
Proc. SPIE 2882, Stress-induced warpage and the compensation in a composite micro-accelerometer, 0000 (17 September 1996); doi: 10.1117/12.250697
Proc. SPIE 2882, Micromachined vibrating gyroscopes, 0000 (17 September 1996); doi: 10.1117/12.250699
Proc. SPIE 2882, Micromachined rotating yaw-rate sensor, 0000 (17 September 1996); doi: 10.1117/12.250700
Modeling
Proc. SPIE 2882, Microsystem CAD, 0000 (17 September 1996); doi: 10.1117/12.250701
Proc. SPIE 2882, Performance trade-offs for a surface micromachined microengine, 0000 (17 September 1996); doi: 10.1117/12.250702
Proc. SPIE 2882, Novel MEMS simulation tool for thermal-based radiation sensors, 0000 (17 September 1996); doi: 10.1117/12.250704
Actuators
Proc. SPIE 2882, Mercury-contact switching with gap-closing microcantilever, 0000 (17 September 1996); doi: 10.1117/12.250705
Proc. SPIE 2882, Design considerations of the electrical contacts in (micro)relays, 0000 (17 September 1996); doi: 10.1117/12.250706
Proc. SPIE 2882, Development and fabrication of a rotary micropump and its industrial and medical applications, 0000 (17 September 1996); doi: 10.1117/12.250707
Proc. SPIE 2882, Development and manufacturing of a two-dimensional microactuator for moving an optical fiber, 0000 (17 September 1996); doi: 10.1117/12.250708
Flow and Magnetic Sensor
Proc. SPIE 2882, Thermoelectric CMOS anemometers, 0000 (17 September 1996); doi: 10.1117/12.250709
Pressure and Strain Sensors
Proc. SPIE 2882, Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media, 0000 (17 September 1996); doi: 10.1117/12.250710
Proc. SPIE 2882, Planar surface-micromachined pressure sensor with a subsurface, embedded reference pressure cavity, 0000 (17 September 1996); doi: 10.1117/12.250711
Proc. SPIE 2882, Phase-sensitive techniques applied to a micromachined vacuum sensor, 0000 (17 September 1996); doi: 10.1117/12.250713
Proc. SPIE 2882, Strain sensitive resonant gate transistor, 0000 (17 September 1996); doi: 10.1117/12.250714
Poster Session
Proc. SPIE 2882, Semiconductor acceleration sensor, 0000 (17 September 1996); doi: 10.1117/12.250715
Proc. SPIE 2882, Force measurements of polysilicon thermal microactuators, 0000 (17 September 1996); doi: 10.1117/12.250716
Proc. SPIE 2882, Industrial microsystems on top of CMOS design and process, 0000 (17 September 1996); doi: 10.1117/12.250717
Proc. SPIE 2882, Innovative frequency measurement technique used in the design of a single channel frequency to digital converter ASIC, 0000 (17 September 1996); doi: 10.1117/12.250718
Proc. SPIE 2882, Numerical analysis of an optical motor based on the radiation pressure, 0000 (17 September 1996); doi: 10.1117/12.250719
Plenary Papers
Proc. SPIE 2882, Application of micromachining technology to optical devices and systems, 0000 (17 September 1996); doi: 10.1117/12.250721
Proc. SPIE 2882, Commercializing MEMS--too fast or too slow?, 0000 (17 September 1996); doi: 10.1117/12.250722
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