PROCEEDINGS VOLUME 3008
PHOTONICS WEST '97 | 8-14 FEBRUARY 1997
Miniaturized Systems with Micro-Optics and Micromechanics II
PHOTONICS WEST '97
8-14 February 1997
San Jose, CA, United States
MOEM Devices
Proc. SPIE 3008, MOEM systems in Europe, 0000 (11 April 1997); doi: 10.1117/12.271403
Proc. SPIE 3008, Micro-opto-electro-mechanical (MOEM) adaptive optic system, 0000 (11 April 1997); doi: 10.1117/12.271413
Proc. SPIE 3008, Laser aperture integrated with position-sensing detectors, 0000 (11 April 1997); doi: 10.1117/12.271422
Proc. SPIE 3008, Surface micromachined tunable resonant cavity LED using wafer bonding, 0000 (11 April 1997); doi: 10.1117/12.271432
Proc. SPIE 3008, Design and fabrication of optoelectronic multichip module prototypes using MEMS fabrication techniques, 0000 (11 April 1997); doi: 10.1117/12.271439
Proc. SPIE 3008, Optical probe for micromachine performance analysis, 0000 (11 April 1997); doi: 10.1117/12.271440
Proc. SPIE 3008, InP-based micromechanical tunable and selective photodetector for WDM systems, 0000 (11 April 1997); doi: 10.1117/12.271441
Beam Steering and Micro-optical Scanners
Proc. SPIE 3008, Potential of transmittive micro-optical systems for miniaturized scanners, modulators, and switches, 0000 (11 April 1997); doi: 10.1117/12.271442
Proc. SPIE 3008, Micromachined microscanners for optical scanning, 0000 (11 April 1997); doi: 10.1117/12.271443
Proc. SPIE 3008, Microactuated mirrors for beam steering, 0000 (11 April 1997); doi: 10.1117/12.271404
Proc. SPIE 3008, Designs to improve polysilicon micromirror surface topology, 0000 (11 April 1997); doi: 10.1117/12.271405
Proc. SPIE 3008, Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror, 0000 (11 April 1997); doi: 10.1117/12.271406
Micro-optics Integration I
Proc. SPIE 3008, Polymer guided-wave integrated optics: an enabling technology for micro-opto-electro-mechanical systems, 0000 (11 April 1997); doi: 10.1117/12.271407
Proc. SPIE 3008, Exact numerical technique for the analysis of Bragg reflectors in integrated optical filters, 0000 (11 April 1997); doi: 10.1117/12.271408
Proc. SPIE 3008, Optical displacement measurement using a monolithic Michelson interferometer, 0000 (11 April 1997); doi: 10.1117/12.271409
Proc. SPIE 3008, Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect, 0000 (11 April 1997); doi: 10.1117/12.271410
Proc. SPIE 3008, Loss reduction of abrupt waveguide bends using Fabry-Perot cavity for optical interconnects, 0000 (11 April 1997); doi: 10.1117/12.271411
Optical Processing and Control
Proc. SPIE 3008, Optical transformer and collimator for efficient fiber coupling, 0000 (11 April 1997); doi: 10.1117/12.271412
Proc. SPIE 3008, Optical communication link using micromachined corner cube reflector, 0000 (11 April 1997); doi: 10.1117/12.271414
Proc. SPIE 3008, Micro-optical beam transformation system for high-power laser diode bars with efficient brightness conservation, 0000 (11 April 1997); doi: 10.1117/12.271415
Proc. SPIE 3008, Micro-optical modulators and switches for multimode fiber applications, 0000 (11 April 1997); doi: 10.1117/12.271416
MOEM Processes
Proc. SPIE 3008, E-beam lithography: an efficient tool for the fabrication of diffractive and micro-optical elements, 0000 (11 April 1997); doi: 10.1117/12.271417
Proc. SPIE 3008, Fabrication and application of subwavelength gratings, 0000 (11 April 1997); doi: 10.1117/12.271418
Proc. SPIE 3008, Assembling of micro-optical components, 0000 (11 April 1997); doi: 10.1117/12.271419
Proc. SPIE 3008, Strength of indium phosphide-based microstructures, 0000 (11 April 1997); doi: 10.1117/12.271420
Proc. SPIE 3008, Optical characterization methods of InP-based micro-opto-electro-mechanical systems, 0000 (11 April 1997); doi: 10.1117/12.271421
Proc. SPIE 3008, Dielectric microfilter arrays for multispectral measuring devices, 0000 (11 April 1997); doi: 10.1117/12.271423
Proc. SPIE 3008, Micro-optical and optomechanical systems fabricated by the LIGA technique, 0000 (11 April 1997); doi: 10.1117/12.271424
Proc. SPIE 3008, Micro-optic fabrication using one-level gray-tone lithography, 0000 (11 April 1997); doi: 10.1117/12.271425
Proc. SPIE 3008, LIGA tunable spectral filter performance, 0000 (11 April 1997); doi: 10.1117/12.271426
Proc. SPIE 3008, Silicon mirror arrays fabricated by using bulk and surface micromachining, 0000 (11 April 1997); doi: 10.1117/12.271427
Proc. SPIE 3008, Method of computer-controlled microlens processing and testing, 0000 (11 April 1997); doi: 10.1117/12.271428
Micro-optics Integration II
Proc. SPIE 3008, Photonic crystal fabrication by way of coherent microparticle interaction, 0000 (11 April 1997); doi: 10.1117/12.271429
Proc. SPIE 3008, Fabrication of optical waveguides by the diffusion of Disperse Red 1 dye, 0000 (11 April 1997); doi: 10.1117/12.271430
Proc. SPIE 3008, New intensity GaAs electro-optic modulator realized by intersecting waveguides, 0000 (11 April 1997); doi: 10.1117/12.271431
Proc. SPIE 3008, Electromagnetic near field induced by surface defects in microstructures, 0000 (11 April 1997); doi: 10.1117/12.271433
MEM Actuator Materials
Proc. SPIE 3008, Ferroelectric PZT thin films on Si and SBN substrates, 0000 (11 April 1997); doi: 10.1117/12.271434
Proc. SPIE 3008, Ferroelectric PbZr1-xTixO3 thin films made by various metalorganic chemical vapor deposition techniques, 0000 (11 April 1997); doi: 10.1117/12.271435
Proc. SPIE 3008, Ferroelectric SrBi2Ta2O9 thin films made by one- and two-step metalorganic chemical vapor deposition, 0000 (11 April 1997); doi: 10.1117/12.271436
Proc. SPIE 3008, High-resolution Mueller matrix polarimetry of thin film PLZT electro-optic modulators, 0000 (11 April 1997); doi: 10.1117/12.271437
Micro-optics Integration I
Proc. SPIE 3008, Microjoinery for optomechanical systems, 0000 (11 April 1997); doi: 10.1117/12.271438
Back to Top