PROCEEDINGS VOLUME 3099
LASERS AND OPTICS IN MANUFACTURING III | 16-20 JUNE 1997
Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
LASERS AND OPTICS IN MANUFACTURING III
16-20 June 1997
Munich, Germany
Micromeasurements and Microsystems
Proc. SPIE 3099, Linear and angular velocity and displacement sensors for industrial use based on planar optical technology, 0000 (24 September 1997); doi: 10.1117/12.281211
Proc. SPIE 3099, Image sensing with maximum sensitivity using industrial CMOS technology, 0000 (24 September 1997); doi: 10.1117/12.281222
Enabling Technologies for Optical Microsensors and Microsystems
Proc. SPIE 3099, Large-field, high-resolution photolithography, 0000 (24 September 1997); doi: 10.1117/12.281232
Proc. SPIE 3099, Cost-effective machining of brittle materials (glasses and ceramics) eliminating/minimizing the polishing process, 0000 (24 September 1997); doi: 10.1117/12.281243
Proc. SPIE 3099, Single- and zero- order binary phase gratings for visible and UV light, 0000 (24 September 1997); doi: 10.1117/12.281251
Replication Technologies and Microlens Arrays
Proc. SPIE 3099, Replication techniques for micro-optics, 0000 (24 September 1997); doi: 10.1117/12.281256
Proc. SPIE 3099, Replication of optical components using a silicone rubber intermediate replica, 0000 (24 September 1997); doi: 10.1117/12.281257
Proc. SPIE 3099, Contactless embossing of microlenses: a new technology for manufacturing refractive microlenses, 0000 (24 September 1997); doi: 10.1117/12.281212
Proc. SPIE 3099, Novel method for fabricating microlens arrays, 0000 (24 September 1997); doi: 10.1117/12.281213
Proc. SPIE 3099, Method for improving performance of IR focal plane array using microlens array, 0000 (24 September 1997); doi: 10.1117/12.281214
Proc. SPIE 3099, Polymerized PMMA replication of micro-optics elements, 0000 (24 September 1997); doi: 10.1117/12.281216
Optical Sources for Microsystems
Proc. SPIE 3099, Integrated optical sources for microsystems, 0000 (24 September 1997); doi: 10.1117/12.281217
Proc. SPIE 3099, Low-cost Nd:YAG microchip laser device becomes mature for industrial applications, 0000 (24 September 1997); doi: 10.1117/12.281218
Proc. SPIE 3099, Hybrid coupling of laser light sources to silicon (oxy) nitride-based waveguides, 0000 (24 September 1997); doi: 10.1117/12.281219
Proc. SPIE 3099, Short amplifying planar waveguides by new glass processing technology, 0000 (24 September 1997); doi: 10.1117/12.281220
Applications of Microsystem Technologies
Proc. SPIE 3099, Miniaturized fiber optic switches for optical metrology and optical communication, 0000 (24 September 1997); doi: 10.1117/12.281221
Proc. SPIE 3099, Performance of interferometric rotation encoders using diffraction gratings, 0000 (24 September 1997); doi: 10.1117/12.281223
Proc. SPIE 3099, Optical receiver module for very high bit rates, 0000 (24 September 1997); doi: 10.1117/12.281224
Proc. SPIE 3099, Electrically tunable NIR spectrometer, 0000 (24 September 1997); doi: 10.1117/12.281225
Proc. SPIE 3099, High-resolution self-diffractive adaptive element for remote displacement sensing, 0000 (24 September 1997); doi: 10.1117/12.281226
Modeling and Characterization of Micro-Optic Structures
Proc. SPIE 3099, Design, fabrication, and testing of micro-optical components for sensors and microsystems, 0000 (24 September 1997); doi: 10.1117/12.281227
Proc. SPIE 3099, Diffraction-analysis-based characterization of very fine gratings, 0000 (24 September 1997); doi: 10.1117/12.281228
Proc. SPIE 3099, Novel method for analyzing signal errors caused by polygonal approximations in the fabrication of diffractive elements, 0000 (24 September 1997); doi: 10.1117/12.281229
Proc. SPIE 3099, Characterization of chirped phase masks for UV applications by writing and investigation of fiber Bragg gratings, 0000 (24 September 1997); doi: 10.1117/12.281230
Applied Waveguide Technologies
Proc. SPIE 3099, Simple and reusable fiber-to-chip interconnect with adjustable coupling efficiency, 0000 (24 September 1997); doi: 10.1117/12.281233
Proc. SPIE 3099, Micromachined aperture probe tip for multifunctional scanning probe microscopy, 0000 (24 September 1997); doi: 10.1117/12.281234
Proc. SPIE 3099, Optimization of LPCVD silicon oxynitride growth to large refractive index homogeneity and layer thickness uniformity, 0000 (24 September 1997); doi: 10.1117/12.281235
Proc. SPIE 3099, Unidirectional waveguide grating coupling by means of parallelogrammic grooves, 0000 (24 September 1997); doi: 10.1117/12.281236
Applications of Microsystem Technologies
Proc. SPIE 3099, Diffractive optical elements with polarization multiplexing, 0000 (24 September 1997); doi: 10.1117/12.281237
Plenary Paper
Proc. SPIE 3099, Use of diffracting optics in metrology and sensing, 0000 (24 September 1997); doi: 10.1117/12.281238
Optical Fiber Sensor Technologies and Applications
Proc. SPIE 3099, Fiber-optic security monitoring sensor, 0000 (24 September 1997); doi: 10.1117/12.281239
Proc. SPIE 3099, Smart structures for sea, land, and space, 0000 (24 September 1997); doi: 10.1117/12.281240
Proc. SPIE 3099, Electric and magnetic field sensing for high-voltage applications, 0000 (24 September 1997); doi: 10.1117/12.281241
Proc. SPIE 3099, Reliability and durability of fiber grating sensors in structural monitoring applications, 0000 (24 September 1997); doi: 10.1117/12.281242
Proc. SPIE 3099, Fiber optic pore-water-pressure sensing system for structural monitoring of a large dam at L'Eau D'Heure in Belgium, 0000 (24 September 1997); doi: 10.1117/12.281244
Proc. SPIE 3099, Fiber Bragg grating sensors, 0000 (24 September 1997); doi: 10.1117/12.281245
Proc. SPIE 3099, Frequency multiplexing of in-fiber Bragg grating sensors using tunable laser, 0000 (24 September 1997); doi: 10.1117/12.281246
Proc. SPIE 3099, Stabilization in an optical fiber interferometer using a semiconductor laser, 0000 (24 September 1997); doi: 10.1117/12.281247
Proc. SPIE 3099, Simultaneous recovery of temperature and strain: an artificial neural network approach, 0000 (24 September 1997); doi: 10.1117/12.281248
Proc. SPIE 3099, Reabsorption effects on calibration of fluorescence-lifetime-based sensors, 0000 (24 September 1997); doi: 10.1117/12.281249
Proc. SPIE 3099, Multichip transmitter/receiver module for fiber optical sensors, 0000 (24 September 1997); doi: 10.1117/12.281250
Proc. SPIE 3099, Fiber optic Sagnac interferometer as polarimetric sensor using a nonpolarized and a broadband source, 0000 (24 September 1997); doi: 10.1117/12.281252
Proc. SPIE 3099, Low-cost optical temperature and strain sensing networks using in-line fiber gratings, 0000 (24 September 1997); doi: 10.1117/12.281253
Proc. SPIE 3099, Multicomponent directional laser Doppler velocimeter based on heterodyning by means of Nd:YAG laser frequency modulation and short fiber delay lengths, 0000 (24 September 1997); doi: 10.1117/12.281254
Enabling Technologies for Optical Microsensors and Microsystems
Proc. SPIE 3099, UV-laser machining offers new horizon in diffractive optical elements small-series manufacturing, 0000 (24 September 1997); doi: 10.1117/12.281255
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