PROCEEDINGS VOLUME 3152
OPTICAL SCIENCE, ENGINEERING AND INSTRUMENTATION '97 | 27 JULY - 1 AUGUST 1997
Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors
IN THIS VOLUME

7 Sessions, 27 Papers, 0 Presentations
OPTICAL SCIENCE, ENGINEERING AND INSTRUMENTATION '97
27 July - 1 August 1997
San Diego, CA, United States
Materials and Fabrication Methods
Proc. SPIE 3152, Mirror materials for synchrotron radiation optics, 0000 (1 November 1997); doi: 10.1117/12.295549
Proc. SPIE 3152, Construction and performance of a 1-m-long elliptically bent steel mirror, 0000 (1 November 1997); doi: 10.1117/12.295558
Proc. SPIE 3152, Surface-figuring CVD-SiC mirrors with a five-axis-control ultraprecision grinding machine, 0000 (1 November 1997); doi: 10.1117/12.295565
Proc. SPIE 3152, Achievement of a superpolish on bare stainless steel, 0000 (1 November 1997); doi: 10.1117/12.295567
Proc. SPIE 3152, Manufacturability of compact synchrotron mirrors, 0000 (1 November 1997); doi: 10.1117/12.295568
Proc. SPIE 3152, Fabrication and metrology of high-quality synchrotron mirrors in the sub-arcsec regime, 0000 (1 November 1997); doi: 10.1117/12.295569
Proc. SPIE 3152, Development of technology for vacuum ultraviolet plane grating monochromator to be used with XUV synchrotron source of INDUS I, 0000 (1 November 1997); doi: 10.1117/12.279375
Proc. SPIE 3152, X-ray-induced damage observations on ZERODUR mirrors, 0000 (1 November 1997); doi: 10.1117/12.295570
Mirrors: Bent and Cooled
Proc. SPIE 3152, Elastic bending and water cooling strategies for producing high-quality synchrotron radiation mirrors in silicon, 0000 (1 November 1997); doi: 10.1117/12.295550
Proc. SPIE 3152, Fabrication of a 1-m internally cooled silicon conical mirror for the APS, 0000 (1 November 1997); doi: 10.1117/12.295551
Proc. SPIE 3152, New improvements in bendable mirrors, 0000 (1 November 1997); doi: 10.1117/12.279371
Proc. SPIE 3152, New schemes in the adjustment of bendable elliptical mirrors using a long trace profiler, 0000 (1 November 1997); doi: 10.1117/12.295552
Ray Tracing and Modeling
Proc. SPIE 3152, Structured slope errors on real x-ray mirrors: ray tracing versus experiment, 0000 (1 November 1997); doi: 10.1117/12.295553
Proc. SPIE 3152, XOP: a multiplatform graphical user interface for synchrotron radiation spectral and optics calculations, 0000 (1 November 1997); doi: 10.1117/12.295554
Metrology Methods
Proc. SPIE 3152, Metrology laboratory requirements for third-generation synchrotron radiation sources, 0000 (1 November 1997); doi: 10.1117/12.295555
Proc. SPIE 3152, Improvement of synchrotron radiation mirrors below the 0.1-arcsec rms slope error limit with the help of a long trace profiler, 0000 (1 November 1997); doi: 10.1117/12.295556
Proc. SPIE 3152, Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors, 0000 (1 November 1997); doi: 10.1117/12.295557
Proc. SPIE 3152, Incoherent x-ray mirror surface metrology, 0000 (1 November 1997); doi: 10.1117/12.295559
EUV Lithography
Proc. SPIE 3152, Interferometric testing of EUV lithography cameras, 0000 (1 November 1997); doi: 10.1117/12.279372
Proc. SPIE 3152, Design of imaging system for EUVL, 0000 (1 November 1997); doi: 10.1117/12.279373
Multilayers and Measurements
Proc. SPIE 3152, Experimental multilayer survey in the VUV, 0000 (1 November 1997); doi: 10.1117/12.295560
Proc. SPIE 3152, Deposition of x-ray multilayers on long-size substrates for synchrotron applications, 0000 (1 November 1997); doi: 10.1117/12.295561
Proc. SPIE 3152, Supermirror fabrication via electroforming, 0000 (1 November 1997); doi: 10.1117/12.295562
Poster Session
Proc. SPIE 3152, Thermal and radiation stability of x-ray mirrors based on diamondlike films, 0000 (1 November 1997); doi: 10.1117/12.295563
Proc. SPIE 3152, Fabrication of a 1.4-meter flat synchrotron mirror, 0000 (1 November 1997); doi: 10.1117/12.295564
Mirrors: Bent and Cooled
Proc. SPIE 3152, Progress toward submicron hard x-ray imaging using elliptically bent mirrors, 0000 (1 November 1997); doi: 10.1117/12.279374
Proc. SPIE 3152, Experimental shape optimization of bent crystals, 0000 (1 November 1997); doi: 10.1117/12.295566
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