PROCEEDINGS VOLUME 3225
MICROMACHINING AND MICROFABRICATION | 29-30 SEPTEMBER 1997
Microlithography and Metrology in Micromachining III
IN THIS VOLUME

0 Sessions, 14 Papers, 0 Presentations
MICROMACHINING AND MICROFABRICATION
29-30 September 1997
Austin, TX, United States
Micrometrology Techniques
Proc. SPIE 3225, Accurate force measurements for miniature mechanical systems: a review of progress, 0000 (2 September 1997); doi: 10.1117/12.284543
Proc. SPIE 3225, Mechanical properties of microstructures: experiments and theory, 0000 (2 September 1997); doi: 10.1117/12.284550
Proc. SPIE 3225, MEMS metrology station based on two interferometers, 0000 (2 September 1997); doi: 10.1117/12.284551
Proc. SPIE 3225, Measuring frequency response of surface-micromachined resonators, 0000 (2 September 1997); doi: 10.1117/12.284552
Proc. SPIE 3225, Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry, 0000 (2 September 1997); doi: 10.1117/12.284553
Metrology and Tools in Microfabrication I
Proc. SPIE 3225, Modeling of stress-induced curvature in surface-micromachined devices, 0000 (2 September 1997); doi: 10.1117/12.284554
Proc. SPIE 3225, High-precision positioning stages for micro- and nanolithography, 0000 (2 September 1997); doi: 10.1117/12.284555
Proc. SPIE 3225, Engineering tool set for monolithic and hybrid microsystem design, 0000 (2 September 1997); doi: 10.1117/12.284556
Proc. SPIE 3225, Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing, 0000 (2 September 1997); doi: 10.1117/12.284544
Metrology and Tools in Microfabrication II
Proc. SPIE 3225, Potentials for inspection and metrology of MEMS using a combined scanning electron microscope (SEM) and proximal probe microscope (PPM), 0000 (2 September 1997); doi: 10.1117/12.284545
Proc. SPIE 3225, Cost-effective mask fabrication on Kapton membrane for deep x-ray lithography, 0000 (2 September 1997); doi: 10.1117/12.284546
Proc. SPIE 3225, Integrated micromachined transmission lines and endfire slotline antennas, 0000 (2 September 1997); doi: 10.1117/12.284547
Proc. SPIE 3225, One-step microlithography, 0000 (2 September 1997); doi: 10.1117/12.284548
Proc. SPIE 3225, Photofabrication of the third dimension of NiTi shape memory alloy microactuators, 0000 (2 September 1997); doi: 10.1117/12.284549
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