PROCEEDINGS VOLUME 3226
MICROMACHINING AND MICROFABRICATION | 29-30 SEPTEMBER 1997
Microelectronic Structures and MEMS for Optical Processing III
MICROMACHINING AND MICROFABRICATION
29-30 September 1997
Austin, TX, United States
Optical MEM Design and Fabrication
Proc. SPIE 3226, Fabrication of microrelief surfaces using a one-step lithography process, 0000 (2 September 1997); doi: 10.1117/12.284557
Proc. SPIE 3226, SAMPLE (Sandia agile MEMS prototyping, layout tools, and education), 0000 (2 September 1997); doi: 10.1117/12.284568
Proc. SPIE 3226, Design and development of microstructures for MEMS applications, 0000 (2 September 1997); doi: 10.1117/12.284571
Micro-Optical Components and Optical Interconnects
Proc. SPIE 3226, Refractive and diffractive elements for micro-optical systems, 0000 (2 September 1997); doi: 10.1117/12.284572
Proc. SPIE 3226, Replicated diffractive optical lens components for laser-diode to fiber coupling in optical bench arrangements, 0000 (2 September 1997); doi: 10.1117/12.284573
Proc. SPIE 3226, Thermal management in planar optical systems with active components, 0000 (2 September 1997); doi: 10.1117/12.284574
MOEM Switches
Proc. SPIE 3226, G-performance characterization of surface-micromachined FDDI optical bypass switches, 0000 (2 September 1997); doi: 10.1117/12.284575
Proc. SPIE 3226, Optical fiber-coupled variable attenuator using a MARS modulator, 0000 (2 September 1997); doi: 10.1117/12.284576
Proc. SPIE 3226, Multichannel fiber-optic switches based on MOEM systems, 0000 (2 September 1997); doi: 10.1117/12.284577
Proc. SPIE 3226, Micro-opto-mechanical systems: applications in pulsed fiber lasers and optical switching, 0000 (2 September 1997); doi: 10.1117/12.284558
Micromirrors, Modulators, and Actuators
Proc. SPIE 3226, Design, modeling and verification of MEMS silicon torsion mirror, 0000 (2 September 1997); doi: 10.1117/12.284559
Proc. SPIE 3226, Nonlinear flexures for stable deflection of an electrostatically actuated micromirror, 0000 (2 September 1997); doi: 10.1117/12.284560
Proc. SPIE 3226, Vertical thermal actuators for micro-opto-electro-mechanical systems, 0000 (2 September 1997); doi: 10.1117/12.284561
Proc. SPIE 3226, Effects of membrane curvature on the optical performance of the Mechanical Anti-Reflection Switch (MARS) modulator, 0000 (2 September 1997); doi: 10.1117/12.284562
Microsystems Integration and Applications
Proc. SPIE 3226, Physical and chemical sensing using monolithic semiconductor optical transducers, 0000 (2 September 1997); doi: 10.1117/12.284563
Proc. SPIE 3226, Integrated optics for displacement sensors, 0000 (2 September 1997); doi: 10.1117/12.284564
Proc. SPIE 3226, Strategies toward the development of integrated chemical sensors fabricated from light-emitting porous silicon, 0000 (2 September 1997); doi: 10.1117/12.284565
Proc. SPIE 3226, Construction of a fully functional NSOM using MUMPs technology, 0000 (2 September 1997); doi: 10.1117/12.284566
Proc. SPIE 3226, Tristimulus color sensitive photodetector in a BiCMOS technology, 0000 (2 September 1997); doi: 10.1117/12.284567
Micro-Optical Components and Optical Interconnects
Proc. SPIE 3226, Compact optical interconnect module, 0000 (2 September 1997); doi: 10.1117/12.284569
Microsystems Integration and Applications
Proc. SPIE 3226, Buried double p-n junction structure using a CMOS process for wavelength detection, 0000 (2 September 1997); doi: 10.1117/12.284570
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