PROCEEDINGS VOLUME 3242
FAR EAST AND PACIFIC RIM SYMPOSIUM ON SMART MATERIALS, STRUCTURES, AND MEMS | 10-13 DECEMBER 1997
Smart Electronics and MEMS
FAR EAST AND PACIFIC RIM SYMPOSIUM ON SMART MATERIALS, STRUCTURES, AND MEMS
10-13 December 1997
Adelaide, Australia
Microfabrication Technology
Proc. SPIE 3242, Design and fabrication of wireless remotely readable MEMS accelerometers, 0000 (14 November 1997); doi: 10.1117/12.293537
Proc. SPIE 3242, New method to fabricate diffractive blazed gratings by anisotropic etching on (110) silicon wafers, 0000 (14 November 1997); doi: 10.1117/12.293547
Proc. SPIE 3242, Novel method for electroplating on silicon without the need of a continuous-plating base film, 0000 (14 November 1997); doi: 10.1117/12.293558
Proc. SPIE 3242, Microfabrication of capillary columns on silicon, 0000 (14 November 1997); doi: 10.1117/12.293567
Smart Electronics
Proc. SPIE 3242, Stand-alone remotely interrogated device for the real-time health monitoring of bonded structural repairs, 0000 (14 November 1997); doi: 10.1117/12.293577
Proc. SPIE 3242, Laterally self-oscillated and force-balanced microvibratory gyroscope packaged in a vacuum package with a conditioning ASIC, 0000 (14 November 1997); doi: 10.1117/12.293579
Proc. SPIE 3242, Dynamically tuned vibratory micromechanical gyroscope accelerometer, 0000 (14 November 1997); doi: 10.1117/12.293580
Proc. SPIE 3242, Surface-micromachined accelerometer using a movable polysilicon gate FET, 0000 (14 November 1997); doi: 10.1117/12.293581
Thin Films and MEMS
Proc. SPIE 3242, Design methodology for micromagnetic bearing systems, 0000 (14 November 1997); doi: 10.1117/12.293582
Proc. SPIE 3242, Functionally tailored nanoparticle-based self-assembled thin films, 0000 (14 November 1997); doi: 10.1117/12.293538
Proc. SPIE 3242, Design and analysis of surface-micromachined two-axis silicon yaw-rate sensor, 0000 (14 November 1997); doi: 10.1117/12.293539
Proc. SPIE 3242, Optimization of optical fiber characteristic using Taguchi's method of design of experiment (DOE), 0000 (14 November 1997); doi: 10.1117/12.293540
Microengineered Components
Proc. SPIE 3242, Electromagnetically driven silicon microvalve for large-flow pneumatic controls, 0000 (14 November 1997); doi: 10.1117/12.293541
Proc. SPIE 3242, Microelectrode array: a new method for the design of electrostatic microactuators and capacitive microsensors, 0000 (14 November 1997); doi: 10.1117/12.293542
Proc. SPIE 3242, 3D micro-EDM machining technique, 0000 (14 November 1997); doi: 10.1117/12.293543
Smart Sensors I
Proc. SPIE 3242, Development of an electronic nose, 0000 (14 November 1997); doi: 10.1117/12.293544
Proc. SPIE 3242, Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator, 0000 (14 November 1997); doi: 10.1117/12.293545
Proc. SPIE 3242, Microelectronic strategies and advantages in developing dual-block assembled tactile sensors, 0000 (14 November 1997); doi: 10.1117/12.293546
Proc. SPIE 3242, Area-variable capacitive microaccelerometer with force-balancing electrodes, 0000 (14 November 1997); doi: 10.1117/12.293548
Poster Session
Proc. SPIE 3242, Simulation of dynamic characteristics of micropumps using PSPICE, 0000 (14 November 1997); doi: 10.1117/12.293549
Proc. SPIE 3242, New type of thermal analyzer with a micro-air-bridge heater, 0000 (14 November 1997); doi: 10.1117/12.293550
Proc. SPIE 3242, Eddy current microsensor for use in micromachine applications, 0000 (14 November 1997); doi: 10.1117/12.293551
Proc. SPIE 3242, Operational characteristics of a same-phase drive-type ultrasonic motor, 0000 (14 November 1997); doi: 10.1117/12.293552
Proc. SPIE 3242, Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves, 0000 (14 November 1997); doi: 10.1117/12.293553
Proc. SPIE 3242, Force-balanced dual-axis microgyroscope, 0000 (14 November 1997); doi: 10.1117/12.293554
Proc. SPIE 3242, Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology, 0000 (14 November 1997); doi: 10.1117/12.293555
Proc. SPIE 3242, Design and fabrication of high-torque electrostatic micromotors using micromachining of thin polysilicon sheets, 0000 (14 November 1997); doi: 10.1117/12.293556
Proc. SPIE 3242, Micropump based on temperature dependence of liquid viscosity, 0000 (14 November 1997); doi: 10.1117/12.293557
Proc. SPIE 3242, Deposition of PZT thin films by pulsed laser ablation for MEMS application, 0000 (14 November 1997); doi: 10.1117/12.293559
Proc. SPIE 3242, Characterization and application of jet-printed thin PZT layers for actuation of MEMS, 0000 (14 November 1997); doi: 10.1117/12.293560
Intelligent Microsystems
Proc. SPIE 3242, Real-time and multichannel signal abstraction for piezoelectric resonant sensor array, 0000 (14 November 1997); doi: 10.1117/12.293561
Proc. SPIE 3242, Measurement of thermal expansion coefficient of poly-Si using microgauge sensors, 0000 (14 November 1997); doi: 10.1117/12.293562
Optoelectronics and Displays
Proc. SPIE 3242, Micromachined field emitter arrays for application to FED, 0000 (14 November 1997); doi: 10.1117/12.293563
Proc. SPIE 3242, Oxide phosphors as thin-film electroluminescent materials, 0000 (14 November 1997); doi: 10.1117/12.293564
Proc. SPIE 3242, High-resolution digital readout for uncooled smart IR focal plane arrays, 0000 (14 November 1997); doi: 10.1117/12.293565
Proc. SPIE 3242, New vacuum packaging method of field emission display, 0000 (14 November 1997); doi: 10.1117/12.293566
Smart Sensors II
Proc. SPIE 3242, Development of uncooled focal plane detector arrays for smart IR sensors, 0000 (14 November 1997); doi: 10.1117/12.293568
Proc. SPIE 3242, Development of a novel type of electromembrane sensing system, 0000 (14 November 1997); doi: 10.1117/12.293569
Proc. SPIE 3242, Monitoring of crack growth beneath a bonded repair using Bragg gratings, 0000 (14 November 1997); doi: 10.1117/12.293570
Proc. SPIE 3242, Optical fiber bundle multiplex sensor for image processing and temperature measurement, 0000 (14 November 1997); doi: 10.1117/12.293571
Plenary Papers
Proc. SPIE 3242, Biomimetics and smart materials, 0000 (14 November 1997); doi: 10.1117/12.293572
Proc. SPIE 3242, Responsive systems based on conducting polymers, 0000 (14 November 1997); doi: 10.1117/12.293573
Proc. SPIE 3242, Optical fiber instrumentation and applications, 0000 (14 November 1997); doi: 10.1117/12.293574
Proc. SPIE 3242, Discussion of integrated circuit (IC), multichip module (MCM), and MEMS applications fabricated through MOSIS, 0000 (14 November 1997); doi: 10.1117/12.293575
Smart Sensors II
Proc. SPIE 3242, Monolithic iMEMS design with CMOS/SOI microcontroller and intelligent pressure sensor, 0000 (14 November 1997); doi: 10.1117/12.293576
Intelligent Microsystems
Proc. SPIE 3242, Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design, 0000 (14 November 1997); doi: 10.1117/12.293578
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