PROCEEDINGS VOLUME 3276
OPTOELECTRONICS AND HIGH-POWER LASERS AND APPLICATIONS | 24-30 JANUARY 1998
Miniaturized Systems with Micro-Optics and Micromechanics III
IN THIS VOLUME

0 Sessions, 28 Papers, 0 Presentations
MOEM Devices  (5)
OPTOELECTRONICS AND HIGH-POWER LASERS AND APPLICATIONS
24-30 January 1998
San Jose, CA, United States
MOEMS Technologies
Proc. SPIE 3276, Polymer waveguides for telecom, datacom, and sensor applications, 0000 (15 March 1998); doi: 10.1117/12.302386
Proc. SPIE 3276, Optical measurement of LIGA milliengine performance, 0000 (15 March 1998); doi: 10.1117/12.302397
Proc. SPIE 3276, Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele- and data-communication networks fabricated using the LIGA technology, 0000 (15 March 1998); doi: 10.1117/12.302405
Proc. SPIE 3276, Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process, 0000 (15 March 1998); doi: 10.1117/12.302408
Proc. SPIE 3276, Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems, 0000 (15 March 1998); doi: 10.1117/12.302409
Beam Steering/Scanning/Micromirrors
Proc. SPIE 3276, MOEM scan engine for bar code reading and factory automation, 0000 (15 March 1998); doi: 10.1117/12.302410
Proc. SPIE 3276, MEMS-based diffractive optical-beam-steering technology, 0000 (15 March 1998); doi: 10.1117/12.302411
Proc. SPIE 3276, System integration of micro-optical systems for beam steering and modulation applications, 0000 (15 March 1998); doi: 10.1117/12.302412
Proc. SPIE 3276, Resonating large-angle and low-consumption micromachined optical scanner, 0000 (15 March 1998); doi: 10.1117/12.302413
Proc. SPIE 3276, Automatic test equipment for the micromirror array, 0000 (15 March 1998); doi: 10.1117/12.302387
Micro-optics/Materials Integration
Proc. SPIE 3276, Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology, 0000 (15 March 1998); doi: 10.1117/12.302389
Proc. SPIE 3276, Fill factor improvement using microlens arrays, 0000 (15 March 1998); doi: 10.1117/12.302390
Proc. SPIE 3276, Optimum design of GaAs waveguides intersecting modulator, 0000 (15 March 1998); doi: 10.1117/12.302391
Proc. SPIE 3276, Near-field scanning optical microscopy: electromagnetic coupling between the aperture tip and the sample, 0000 (15 March 1998); doi: 10.1117/12.302392
Proc. SPIE 3276, Complex microprism structures and their application to multichannel fiber optic switches, 0000 (15 March 1998); doi: 10.1117/12.302393
MOEM Devices
Proc. SPIE 3276, MOEMS: a new European competence center--core competencies, additional technologies, and industrial objectives, 0000 (15 March 1998); doi: 10.1117/12.302394
Proc. SPIE 3276, Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers, 0000 (15 March 1998); doi: 10.1117/12.302395
Proc. SPIE 3276, MEMS-based microgratings: preliminary results of novel configurations, 0000 (15 March 1998); doi: 10.1117/12.302396
Proc. SPIE 3276, In-package active fiber optic micro-aligner, 0000 (15 March 1998); doi: 10.1117/12.302398
Proc. SPIE 3276, Evanescent field sensing: cavity-coupled refractive index sensor (CRIS), 0000 (15 March 1998); doi: 10.1117/12.302399
Micromachine Components and Imaging
Proc. SPIE 3276, Piezoelectrical elements for micro-optical applications, 0000 (15 March 1998); doi: 10.1117/12.302400
Proc. SPIE 3276, Ultrahigh-density optical recording using a scanning near-field optical microscope, 0000 (15 March 1998); doi: 10.1117/12.302401
Proc. SPIE 3276, Microlens arrays formed by melting photoresist and ion beam milling, 0000 (15 March 1998); doi: 10.1117/12.302402
Proc. SPIE 3276, Nonsilicon micromachining for MOEMS elements, 0000 (15 March 1998); doi: 10.1117/12.302403
Proc. SPIE 3276, Fabrication of micro-optical surface profiles by using grayscale masks, 0000 (15 March 1998); doi: 10.1117/12.302404
Proc. SPIE 3276, Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion, 0000 (15 March 1998); doi: 10.1117/12.302406
Micro-optics/Materials Integration
Proc. SPIE 3276, Fiber optic MEMS pressure sensors based on evanescent field interaction, 0000 (15 March 1998); doi: 10.1117/12.302407
MOEMS Technologies
Proc. SPIE 3276, Application of micro- and nanotechnologies for the fabrication of optical devices, 0000 (15 March 1998); doi: 10.1117/12.302388
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